×

System for discharging an area that is scanned by an electron beam

  • US 10,153,126 B2
  • Filed: 05/15/2017
  • Issued: 12/11/2018
  • Est. Priority Date: 05/12/2015
  • Status: Active Grant
First Claim
Patent Images

1. A system for imaging an object, the system comprising:

  • electron optics configured to scan a first area of the object with at least one electron beam, wherein the electron optics comprise a first electrode, wherein the electron optics comprise a column of electrodes for electron beam shaping, electron beam deflection, or electron beam focusing, wherein the first electrode is a part of the column of electrodes, and wherein the first electrode is closer to the object than any other electrode in the column of electrodes; and

    light optics configured to directly illuminate the first electrode with a beam of light without directly illuminating the object, thereby causing an emission of electrons between the first electrode and the object.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×