System for discharging an area that is scanned by an electron beam
First Claim
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1. A system for imaging an object, the system comprising:
- electron optics configured to scan a first area of the object with at least one electron beam, wherein the electron optics comprise a first electrode, wherein the electron optics comprise a column of electrodes for electron beam shaping, electron beam deflection, or electron beam focusing, wherein the first electrode is a part of the column of electrodes, and wherein the first electrode is closer to the object than any other electrode in the column of electrodes; and
light optics configured to directly illuminate the first electrode with a beam of light without directly illuminating the object, thereby causing an emission of electrons between the first electrode and the object.
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Abstract
A method and a system for imaging an object, the system may include electron optics that may be configured to scan a first area of the object with at least one electron beam; wherein the electron optics may include a first electrode; and light optics that may be configured to illuminate at least one target of (a) the first electrode and (b) the object, thereby causing an emission of electrons between the first electrode and the object.
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Citations
18 Claims
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1. A system for imaging an object, the system comprising:
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electron optics configured to scan a first area of the object with at least one electron beam, wherein the electron optics comprise a first electrode, wherein the electron optics comprise a column of electrodes for electron beam shaping, electron beam deflection, or electron beam focusing, wherein the first electrode is a part of the column of electrodes, and wherein the first electrode is closer to the object than any other electrode in the column of electrodes; and light optics configured to directly illuminate the first electrode with a beam of light without directly illuminating the object, thereby causing an emission of electrons between the first electrode and the object. - View Dependent Claims (2, 3, 4)
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5. A method for imaging an object, the method comprising:
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scanning, by electron optics, a first area of the object with at least one electron beam, wherein the electron optics comprise a first electrode, wherein the electron optics comprise a column of electrodes for electron beam shaping, electron beam deflection, or electron beam focusing, wherein the first electrode is a part of the column of electrodes, and wherein the first electrode is closer to the object than any other electrode in the column of electrodes; and directly illuminating, by light optics, the first electrode with a beam of light without directly illuminating the object, thereby causing an emission of electrons between the first electrode and the object. - View Dependent Claims (6, 7, 8)
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9. A method for imaging an object, the method comprising:
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scanning, by electron optics, a first area of the object with at least one electron beam, wherein the electron optics comprise a mirror coupled to a first electrode; and illuminating, by light optics, the mirror with a beam of light, the mirror arranged to direct the beam of light towards the object, thereby causing an emission of electrons between the first electrode and the object. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification