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Fluid deposition appartus and method

  • US 10,155,244 B2
  • Filed: 09/16/2013
  • Issued: 12/18/2018
  • Est. Priority Date: 09/16/2013
  • Status: Active Grant
First Claim
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1. A micro-fluidic probe card, comprising:

  • a probe card body having a first side and a second side;

    a sealant element connected to the second side of the probe card body in a manner that forms a cavity within a hollow interior of the sealant element, wherein the cavity is configured to contact a substrate comprising one or more bio-sensors;

    a fluid inlet comprising a first conduit extending between the first side and the second side, wherein the fluid inlet is configured to provide a fluid from a processing tool to the cavity;

    a fluid outlet comprising a second conduit extending between the first side and the second side, wherein the fluid outlet is configured to remove the fluid from the cavity;

    a performance monitoring element configured to perform an in-situ monitoring process to determine if the fluid has been applied to the substrate, wherein the performance monitoring element comprises an electromagnetic radiation source configured to provide electromagnetic radiation to the fluid and a fluorescence monitor configured to measure a fluorescence response of the fluid; and

    wherein the probe card body comprises a transparent surface positioned between the performance monitoring element and the substrate.

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