Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection

• US 10,156,585 B2
• Filed: 08/03/2016
• Issued: 12/18/2018
• Est. Priority Date: 03/11/2003
• Status: Active Grant

• Current Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Original Assignee: Board of Regents Nevada System of Higher Education (State of Nevada)
• Inventors: Adams, Jesse D., Rogers, Benjamin S., Sulchek, Todd A.
• Primary Examiner(s): Raevis, Robert R
• Application Number:
  US15/227,308
• Publication Number:
  US 20160341765A1
• Time in Patent Office: 867 Days
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01Q 30/14 Liquid environment
• CPC Class Codes: G01Q 60/42 Functionalisation

Abstract

The invention provides a liquid cell for an atomic force microscope. The liquid cell includes a liquid cell housing with an internal cavity to contain a fluid, a plurality of conductive feedthroughs traversing the liquid cell housing between the internal cavity and a dry side of the liquid cell, a cantilevered probe coupled to the liquid cell housing, and a piezoelectric drive element disposed on the cantilevered probe. The cantilevered probe is actuated when a drive voltage is applied to the piezoelectric drive element through at least one of the conductive feedthroughs. A method of imaging an object in a liquid medium and a method of sensing a target species with the liquid cell are also disclosed.

Claims

1. A chemical sensor system comprising:

a cantilevered probe comprising;

a unitary piezoelectric drive and sense element configured to excite and detect vibration, deflection, or bending of the cantilevered probe;

a treated section selected to react with a target chemical species; and

a resistive heater thermally coupled to the treated section;

a drive circuit electrically coupled to the unitary piezoelectric drive and sense element to drive the unitary piezoelectric drive and sense element to excite vibration, deflection, or bending of the cantilevered probe upon reaction of the target chemical species with the treated section when exposed to a sample containing the target chemical species;

a sense circuit electrically coupled to the unitary piezoelectric drive and sense element to detect a change in the vibration, deflection, or bending of the cantilevered probe upon reaction of the chemical species with the treated section when exposed to a sample containing the target chemical species; and

a heater circuit electrically coupled to the resistive heater.

2. The chemical sensor system of claim 1 wherein the unitary piezoelectric drive and sense element is a polycrystalline silicon unitary piezoelectric drive and sense element comprising a deposited polycrystalline silicon, and a dielectric layer is positioned between a single-crystal silicon layer and the polycrystalline silicon unitary piezoelectric drive and sense element.

3. The chemical sensor system of claim 2 wherein the polycrystalline silicon unitary piezoelectric drive and sense element is formed in or near the surface of the single-crystal silicon layer.

4. The chemical sensor system of claim 1 wherein the treated section comprises an applied film and a deflection amplitude of the cantilevered probe is dependent upon frequency and mode of oscillation, internal damping of the cantilevered probe and the applied film, and viscous damping due to gas or liquids surrounding the cantilevered probe.

5. The chemical sensor system of claim 1 wherein the cantilevered probe is attached to a common base at one end and a distal end of the cantilevered probe is free to vibrate, deflect, or bend.

6. The chemical sensor system of claim 1 wherein the cantilevered probe is attached at each end and a center section of the cantilevered probe is free to vibrate, deflect, or bend.

7. The chemical sensor system of claim 1 further comprising a filter or scrubber.

8. The chemical sensor system of claim 1 wherein the resistive heater is configured to initiate a reaction of the chemical species on the treated section.

9. The chemical sensor system of claim 1 wherein the drive circuit, sense circuit, and heater circuit are controlled by data acquisition hardware and software to automate detection and analysis of the chemical species.

10. The chemical sensor system of claim 1 wherein a passivation layer is patterned over the piezoelectric unitary drive and sense element.

11. The chemical sensor system of claim 1 wherein the cantilevered probe is triangular-shaped, V-shaped, or dual-arm shaped.

12. A chemical sensor system comprising:

a substrate including an array of cantilevered probes, each cantilevered probe comprising;

a unitary piezoelectric drive and sense element configured to excite and detect vibration, deflection, or bending of the cantilevered probe; and

a treated section selected to react with a target chemical species; and

a resistive heater thermally coupled to the treated section;

a drive circuit electrically coupled to each unitary piezoelectric drive and sense element to drive the unitary piezoelectric drive and sense element to excite vibration, deflection, or bending of the cantilevered probe upon reaction of the target chemical species with the treated section when exposed to a sample containing the target chemical species;

a sense circuit electrically coupled to each unitary piezoelectric drive and sense element to detect a change in the vibration, deflection, or bending of the cantilevered probe upon reaction of the chemical species with the treated section when exposed to a sample containing the target chemical species; and

a heater circuit electrically coupled to each resistive heater.

13. The chemical sensor system of claim 12 wherein the unitary piezoelectric drive and sense element is a piezoelectric element.

14. The chemical sensor system of claim 12 wherein the unitary piezoelectric drive and sense element is a polycrystalline silicon unitary piezoelectric drive and sense element comprising a deposited polycrystalline silicon, and a dielectric layer is positioned between a single-crystal silicon layer and the polycrystalline silicon unitary piezoelectric drive and sense element.

15. The chemical sensor system of claim 14 wherein the polycrystalline silicon unitary piezoelectric drive and sense element is formed in or near the surface of the single-crystal silicon layer.

16. The chemical sensor system of claim 12 wherein the treated section comprises an applied film and a deflection amplitude of the cantilevered probe is dependent upon frequency and mode of oscillation, internal damping of the cantilevered probe and the applied film, and viscous damping due to gas or liquids surrounding the cantilevered probe.

17. The chemical sensor system of claim 12 wherein at least one of the cantilevered probes is attached to a common base at one end and a distal end of the cantilevered probe is free to vibrate, deflect, or bend.

18. The chemical sensor system of claim 12 wherein at least one of the cantilevered probes is attached at each end and a center section of the cantilevered probe is free to vibrate, deflect, or bend.

19. The chemical sensor system of claim 12 further comprising a filter or scrubber.

20. The chemical sensor system of claim 12 wherein the resistive heater is configured to initiate a reaction of the chemical species on the treated section.

21. The chemical sensor system of claim 12 wherein the drive circuit, sense circuit, and heater circuit are controlled by data acquisition hardware and software to automate detection and analysis of the chemical species.

22. The chemical sensor system of claim 12 wherein at least one of the cantilevered probes has a different treated section and a different sensitivity than the other cantilevered probes to resonate frequency changes resulting from chemical reactions with the different treated section.

23. The chemical sensor system of claim 12 wherein at least one of the cantilevered probes does not have a treated area and is used as a reference probe.

24. The chemical sensor system of claim 12 wherein at least one of the cantilevered probes has a different mechanical shape than the other cantilevered probes.

25. The chemical sensor system of claim 12 wherein at least one of the cantilevered probes is a dual arm cantilever probe.

26. The chemical sensor system of claim 12 wherein the drive circuit excites the cantilevered probes to an overtone of the cantilever fundamental resonant frequency and the sense circuit senses the response at the overtone frequency.

27. The chemical sensor system of claim 12 wherein a passivation layer is patterned over selected areas of the cantilevered probes and substrate.