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Inspection device

  • US 10,157,722 B2
  • Filed: 06/28/2016
  • Issued: 12/18/2018
  • Est. Priority Date: 03/15/2011
  • Status: Active Grant
First Claim
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1. A photoelectron generation device comprising:

  • a photoelectron surface generating photoelectrons by being irradiated with a light from a light source;

    a lens extracting the photoelectrons generated from the photoelectron surface, and the lens accelerating the extracted photoelectrons;

    a numerical aperture being passed through by the accelerated photoelectrons;

    a first tube set to a potential different from a second potential of the photoelectron surface, and the photoelectrons passing through the first tube;

    wherein the potential of the first tube is a high voltage; and

    a second tube covering the first tube and set to the potential as ground;

    wherein the accelerated photoelectrons passing through the numerical aperture are irradiated to an inspection object as a primary beam; and

    wherein the numerical aperture has a hole formed therein which is passed through by the accelerated photoelectrons, and the first tube is arranged inside of the hole.

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