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Measurement of porous film

  • US 10,161,863 B2
  • Filed: 12/18/2015
  • Issued: 12/25/2018
  • Est. Priority Date: 12/22/2014
  • Status: Active Grant
First Claim
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1. A method for measuring radiation scattered by a first sample of a material, the method comprising:

  • determining a first and second wavelength at which the material exhibits substantially no absorption;

    measuring a transmission of the first sample at the first wavelength;

    measuring a transmission of the first sample at the second wavelength; and

    calculating, based on the transmissions of the first sample at the first and second wavelengths, a first parameter, S, of the first sample using a first multivariate regression model comprising first regression coefficients, wherein the first parameter is a parameter which affects a total amount of radiation scattered by the first sample at the first and second wavelengths.

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