Measurement of porous film
First Claim
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1. A method for measuring radiation scattered by a first sample of a material, the method comprising:
- determining a first and second wavelength at which the material exhibits substantially no absorption;
measuring a transmission of the first sample at the first wavelength;
measuring a transmission of the first sample at the second wavelength; and
calculating, based on the transmissions of the first sample at the first and second wavelengths, a first parameter, S, of the first sample using a first multivariate regression model comprising first regression coefficients, wherein the first parameter is a parameter which affects a total amount of radiation scattered by the first sample at the first and second wavelengths.
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Abstract
A method of calculating a first parameter of a first sample of a material is provided. The method includes determining a first and second wavelengths at which the material exhibits substantially no absorption; measuring a transmission of the first sample at the first wavelength; measuring a transmission of the first sample at the second wavelength; and calculating the first parameter of the first sample using a first multivariate regression model including first regression coefficients. The first parameter is a parameter which affects a total amount of radiation scattered by the first sample at the first and second wavelengths.
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Citations
27 Claims
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1. A method for measuring radiation scattered by a first sample of a material, the method comprising:
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determining a first and second wavelength at which the material exhibits substantially no absorption; measuring a transmission of the first sample at the first wavelength; measuring a transmission of the first sample at the second wavelength; and calculating, based on the transmissions of the first sample at the first and second wavelengths, a first parameter, S, of the first sample using a first multivariate regression model comprising first regression coefficients, wherein the first parameter is a parameter which affects a total amount of radiation scattered by the first sample at the first and second wavelengths. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method, for measuring a first sample of a material, comprising:
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calculating a first parameter, S, of the first sample of the material by; determining a spectrum for the material associated with an absorption by the material to radiation; obtaining a transmission of the first sample at the determined spectrum; determining, based on the transmission of the first sample, scatter correction parameters for the first sample using a scatter correction model; using the scatter correction parameters to calculate the first parameter, S; calculating a second parameter, A, of the first sample, wherein the second parameter is a parameter related to a mass per unit area of the first sample; and combining the calculated first parameter, S, of the first sample with the calculated second parameter, A, of the first sample to calculate at least one of a thickness, the mass per unit area, a density, or a porosity of the first sample. - View Dependent Claims (27)
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Specification