Systems and methods for materials analysis

• US 10,161,887 B2
• Filed: 01/20/2015
• Issued: 12/25/2018
• Est. Priority Date: 01/20/2015
• Status: Active Grant

• Current Assignee: Rtx Corporation
• Original Assignee: United Technologies Corporation (Raytheon Technologies Corporation d/b/a RTX)
• Inventors: Cernatescu, Iuliana, Venkatesh, Vasisht, Furrer, David Ulrich
• Primary Examiner(s): Stoffa, Wyatt
• Application Number:
  US14/600,511
• Publication Number:
  US 20160209340A1
• Time in Patent Office: 1,435 Days
• CPC Class Codes: G01N 2223/605 phases
• CPC Class Codes: G01N 2223/606 texture
• CPC Class Codes: G01N 2223/632 residual life, life expectancy
• CPC Class Codes: G01N 23/20008 Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor monochromators for X- rays using crystals G21K1/06
• CPC Class Codes: G01N 23/20016 Goniometers
• CPC Class Codes: G01N 23/207 Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions

Abstract

A system for the x-ray topography analysis of a sample, comprising in combination, a goniometer having a base, a tube arm rotatably associated with the base, a detector arm rotatably associated with the base, and a sample stage operatively associated with the base. The system also includes an x-ray source operatively coupled with the tube arm and is capable of emitting a non-collimated beam of x-rays. A collimator is operatively associated with the x-ray source and converts the non-collimated beam of x-rays into a collimated beam of x-rays having a quasi-rectangular shape with a divergence less than three degrees in all directions. A detector operatively coupled to the detector arm.

Claims

1. A system for the x-ray topography analysis of a sample, comprising:

a goniometer, the goniometer having a base, a tube arm rotatably associated with the base, a detector arm rotatably associated with the base, and a sample stage operatively associated with the base, the sample stage in operation supports a sample;

an x-ray source, the x-ray source operatively coupled with the tube arm and capable of emitting a non-collimated beam of x-rays;

a collimator operatively associated with the x-ray source, the collimator capable of converting the non-collimated beam of x-rays into a collimated beam of x-rays having a quasi-rectangular shape with a divergence less than one degree in all directions, wherein the collimated beam of x-rays is directed towards a surface of the sample at an angle of incidence relative to the surface of the sample; and

a detector operatively coupled to the detector arm;

wherein the detector has a detector surface and the detector arm is an automated detector arm capable of varying the distance between the detector surface and the sample and an angle between the collimated beam of x-rays and the detector surface;

wherein the detector captures quasi-parallel x-rays diffracted off the surface of the sample at an angle of reflection relative to the surface of the sample;

wherein the angle of reflection is different from the angle of incidence; and

wherein the detector is located at the angle of reflection.

2. The system of claim 1, wherein the stage further includes one to three axes of translation.

3. The system of claim 2, wherein the stage translates in one hundred micrometer increments.

4. The system of claim 1, wherein the stage further includes one to three axes of rotation.

5. The system of claim 4, wherein the stage rotates in one hundred micrometer increments.

6. The system of claim 1, wherein the detector is an area detector including a plurality of pixels.

7. The system of claim 6, wherein each of the plurality of pixels has a detection surface having a width between one micrometer and one thousand micrometers.

8. The system of claim 1, wherein the tube arm and detector arm are rotatable with respect to the base so that the angle between the collimated beam of x-rays and a diffracted beam of x-rays may vary between zero degrees and one hundred and seventy degrees.

9. The system of claim 1, wherein the detector is in electrical communication with a computer capable of analyzing an output signal of the detector.

10. An X-ray diffraction system for the characterization of micro-textured regions in a metal sample containing more than one crystalline phase, comprising:

a goniometer, the goniometer having a base, an automated tube arm rotatably associated with the base, an automated detector arm rotatably associated with the base, and an automated sample stage operatively associated with the base, the sample stage in operation supports a sample;

an x-ray source, the x-ray source coupled to the automated tube arm, the x-ray source radiatively supplying an array of non-collimated x-rays;

a collimator, operatively associated with and downstream of the x-ray source, the collimator providing a beam of x-rays that has a divergence in all directions less than or about equal to one degree, wherein the collimated beam of x-rays is directed towards a surface of the sample at an angle of incidence relative to the surface of the sample;

a pixelated detector coupled to the automated detector arm, the detector having a plurality of pixels that extend in a first direction from a point and extend in a second direction from the point, each pixel having a detection surface having a width between one micrometer and one thousand micrometers, the detector generating an output signal;

a computer in electrical communication with the goniometer having a first algorithm that controls the movement of the automated tube arm, the automated detector arm and the automated stage;

wherein the detector has a detector surface and the detector arm is an automated detector arm capable of varying the distance between the detector surface and the sample and an angle between the collimated beam of x-rays and the detector surface;

wherein the detector captures quasi-parallel x-rays diffracted off the surface of the sample at an angle of reflection relative to the surface of the sample;

wherein the angle of reflection is different from the angle of incidence; and

wherein the detector is located at the angle of reflection.

11. The system of claim 10, wherein the automated stage further includes three axes of translation, three axes of rotation and the first algorithm translates and rotates the stage in one hundred micrometer increments.

12. The system of claim 10, wherein the first algorithm varies distance between the sample and the pixelated detector by moving the automated detector arm.

13. The system of claim 10, wherein the automated tube arm and automated detector arm are rotatable with respect to the base, and the first algorithm rotates these arms with respect to the base so that the angle between beam of x-rays and a diffracted beam of x-rays varies between zero degrees and one hundred and seventy degrees.