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Thin films capacitors

  • US 10,163,574 B2
  • Filed: 07/11/2016
  • Issued: 12/25/2018
  • Est. Priority Date: 11/14/2005
  • Status: Active Grant
First Claim
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1. An apparatus, comprising:

  • a top electrode;

    a bottom electrode; and

    a dielectric medium separating the top electrode from the bottom electrode,wherein the top electrode comprise a first segmented electrode and a second segmented electrode,wherein the first segmented electrode and the bottom electrode form a first group of capacitors,wherein the second segmented electrode and the bottom electrode form a second group of capacitors,wherein each capacitor of the first group of capacitors is arranged in parallel,wherein each capacitor of the second group of capacitors is arranged in parallel,wherein the first group of capacitors is in series with the second group of capacitors, andwherein electrodes of the first segmented electrode and the second segmented electrode are arranged in a nested array configuration.

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