Selective cobalt removal for bottom up gapfill

• US 10,163,696 B2
• Filed: 11/11/2016
• Issued: 12/25/2018
• Est. Priority Date: 11/11/2016
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Wang, Xikun, Lei, Jianxin, Ingle, Nitin, Shaviv, Roey
• Primary Examiner(s): Turner, Brian
• Application Number:
  US15/349,460
• Publication Number:
  US 20180138085A1
• Time in Patent Office: 774 Days
• CPC Class Codes: H01L 21/321 After treatment
• CPC Class Codes: H01L 21/32135 by vapour etching only
• CPC Class Codes: H01L 21/32136 using plasmas
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/76877 Filling of holes, grooves or trenches, e.g. vias, with conductive material
• CPC Class Codes: H01L 21/76883 Post-treatment or after-treatment of the conductive material
• CPC Class Codes: H01L 23/53209 based on metals, e.g. alloys, metal silicides H01L23/53285 takes precedence

Abstract

Exemplary methods for removing cobalt material may include flowing a chlorine-containing precursor into a processing region of a semiconductor processing chamber. The methods may include forming a plasma of the chlorine-containing precursor to produce plasma effluents. The methods may also include contacting an exposed region of cobalt with the plasma effluents. The exposed region of cobalt may include an overhang of cobalt on a trench defined on a substrate. The plasma effluents may produce cobalt chloride at the overhang of cobalt. The methods may include flowing a nitrogen-containing precursor into the processing region of the semiconductor processing chamber. The methods may further include contacting the cobalt chloride with the nitrogen-containing precursor. The methods may also include recessing the overhang of cobalt.

Claims

1. An etching method comprising:

flowing a chlorine-containing precursor into a processing region of a semiconductor processing chamber;

forming a plasma of the chlorine-containing precursor to produce plasma effluents;

contacting an exposed region of cobalt with the plasma effluents, wherein the exposed region of cobalt comprises an overhang of cobalt on a trench defined on a substrate, and wherein the plasma effluents produce cobalt chloride at the overhang of cobalt;

flowing a nitrogen-containing precursor into the processing region of the semiconductor processing chamber;

contacting the cobalt chloride with the nitrogen-containing precursor;

recessing the overhang of cobalt; and

contacting the substrate with effluents of a hydrogen-containing plasma to remove residue from exposed cobalt surfaces.

2. The etching method of claim 1, wherein a plasma power of the plasma formed from the chlorine-containing precursor is less than about 100 W.

3. The etching method of claim 1, wherein a temperature of the substrate is maintained between about 175°

C. and about 250°

C. during the etching method.

4. The etching method of claim 1, wherein a pressure within the semiconductor processing chamber is maintained below about 5 Torr.

5. The etching method of claim 1, wherein the etching method removes at least about 5 Å

of cobalt.

6. The etching method of claim 1, further comprising depositing additional cobalt in the trench, and producing a subsequent overhang.

7. The etching method of claim 1, wherein the etching method is repeated for at least two cycles.

8. The etching method of claim 7, wherein a total removal of cobalt after the at least 2 cycles is at least about 20 Å

.

9. The etching method of claim 1, wherein the method removes less than 5% of material proximate a bottom region of the trench.

10. The etching method of claim 1, wherein the etching method has a selectivity of cobalt to titanium nitride greater than or about 50:

1.

11. The etching method of claim 1, wherein the etching method has a selectivity of cobalt to silicon nitride and silicon oxide greater than or about 100:

1;

1.

12. The etching method of claim 1, wherein the processing region is maintained plasma-free while contacting the cobalt chloride with the nitrogen-containing precursor.

13. A method of producing a gap-free cobalt fill, the method comprising:

depositing a first amount of cobalt into a trench defined on a substrate, wherein the deposition forms an overhang of cobalt at an opening of the trench;

flowing a chlorine-containing precursor into a processing region of a semiconductor processing chamber, wherein the processing region houses the substrate;

forming a plasma of the chlorine-containing precursor to produce plasma effluents;

contacting the overhang of cobalt with the plasma effluents to produce cobalt chloride at the overhang of cobalt;

flowing a nitrogen-containing precursor into the processing region of the semiconductor processing chamber;

contacting the cobalt chloride with the nitrogen-containing precursor;

recessing the overhang of cobalt; and

contacting the substrate with effluents of a hydrogen-containing plasma to remove residue from exposed cobalt surfaces.

14. The method of producing a gap-free cobalt fill of claim 13, further comprising depositing a second amount of cobalt into the trench, wherein the deposition forms an additional overhang of cobalt at the opening of the trench.

15. The method of producing a gap-free cobalt fill of claim 13, wherein the method is repeated at least twice.

16. The method of producing a gap-free cobalt fill of claim 13, wherein the first amount of cobalt is at least 80% maintained in the trench while recessing the overhang of cobalt.

17. The method of producing a gap-free cobalt fill of claim 13, wherein a plasma power of the plasma formed from the chlorine-containing precursor is less than or about 60 W, wherein the flow rate of the chlorine-containing precursor is below or about 30 sccm, and wherein the chlorine-containing precursor is flowed into the processing region for a time period of less than or about 20 seconds.

18. The method of producing a gap-free cobalt fill of claim 13, wherein the cobalt is deposited on a metallic nitride liner formed within the trench.