Integrated circuit having a MOM capacitor and method of making same

• US 10,163,896 B2
• Filed: 04/18/2016
• Issued: 12/25/2018
• Est. Priority Date: 11/04/2011
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Liu, Chi-Wen, Wang, Chao-Hsiung
• Primary Examiner(s): Jahan, Bilkis
• Application Number:
  US15/132,001
• Publication Number:
  US 20160233213A1
• Time in Patent Office: 981 Days
• CPC Class Codes: H01L 23/5223 Capacitor integral with wiring layers
• CPC Class Codes: H01L 27/0629 in combination with diodes, or resistors, or capacitors
• CPC Class Codes: H01L 27/1203 the substrate comprising an insulating body on a semiconductor body, e.g. SOI three-dimensional layout H01L27/0688
• CPC Class Codes: H01L 27/1211 combined with field-effect transistors with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
• CPC Class Codes: H01L 28/40 Capacitors
• CPC Class Codes: H01L 28/60 Electrodes
• CPC Class Codes: H01L 28/90 having vertical extensions
• CPC Class Codes: H01L 29/40 Electrodes ; Multistep manufacturing processes therefor
• CPC Class Codes: H01L 29/94 Metal-insulator-semiconductors, e.g. MOS
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

An integrated circuit can include a MOM capacitor formed simultaneously with other devices, such as finFETs. A dielectric layer formed on a substrate has a first semiconductor fin therein and a second semiconductor fin therein. Respective top portions of the fins are removed to form respective recesses in the dielectric layer. First and second electrodes are formed in the recesses. The first and second electrodes and the interjacent dielectric layer form a MOM capacitor.

Claims

1. An integrated circuit comprising:

a capacitor, the capacitor comprising;

a substrate;

a capacitor dielectric layer on a major surface of the substrate;

a first semiconductor fin extending from the major surface of the substrate into the capacitor dielectric layer;

a first capacitor electrode atop the first semiconductor fin;

a second semiconductor fin extending from the major surface of the substrate into the capacitor dielectric layer, the capacitor dielectric layer having a first portion extending continuously from a sidewall of the first semiconductor fin to a sidewall of the second semiconductor fin; and

a second capacitor electrode atop the second semiconductor fin, the second capacitor electrode being electrically insulated from the first capacitor electrode by the capacitor dielectric layer.

2. The integrated circuit of claim 1 further comprising:

a third semiconductor fin extending from the major surface of the substrate into the capacitor dielectric layer, the capacitor dielectric layer having a second portion extending continuously from a sidewall of the second semiconductor fin to a sidewall of the third semiconductor fin; and

a third capacitor electrode atop the third semiconductor fin,

wherein the first and third capacitor electrodes are electrically connected to one another.

3. The integrated circuit of claim 1 further comprising:

a first liner dielectric layer extending along sides of the first capacitor electrode and being disposed between the first semiconductor fin and the first capacitor electrode; and

a second liner dielectric layer extending along sides of the second capacitor electrode and being disposed between the second semiconductor fin and the second capacitor electrode.

4. The integrated circuit of claim 3 wherein the first and second liner dielectric layers comprises silicon oxide or a high-k dielectric comprising a metal Oxide.

5. The integrated circuit of claim 1 wherein the first and second capacitor electrodes are both a material selected from a group consisting essentially of aluminum, copper, tungsten, titanium, a metal silicide, a conductive ceramic, doped silicon, and combinations thereof.

6. The integrated circuit of claim 1, wherein an interface between the first capacitor electrode and the capacitor dielectric layer is in the same plane as an interface between the first semiconductor fin and the capacitor dielectric layer, and wherein an interface between the second capacitor electrode and the capacitor dielectric layer is in the same plane as an interface between the second semiconductor fin and the capacitor dielectric layer.

7. The integrated circuit of claim 2, further comprising:

a transistor, the transistor comprising;

a fourth semiconductor fin extending from the major surface of the substrate;

a gate dielectric on the fourth semiconductor fin;

a gate electrode on the gate dielectric;

a source region in the fourth semiconductor fin; and

a drain region in the fourth semiconductor fin.

8. An integrated circuit comprising:

a dielectric layer having a first semiconductor fin therein and a second semiconductor fin therein; and

a first electrode in the dielectric layer above the first semiconductor fin and a second electrode physically isolated from the first electrode in the dielectric layer above the second semiconductor fin, wherein no portions of the first electrode and the second electrode are disposed on sidewalls of the first semiconductor fin and the second semiconductor fin, wherein top surfaces of the dielectric layer, the first electrode, and the second electrode are level.

9. The integrated circuit of claim 8, wherein the first and second electrodes are formed of a material selected from a group consisting essentially of a metal, a metal alloy, a conductive ceramic, a silicide, a doped semiconductor, and combinations thereof.

10. The integrated circuit of claim 8 further comprising:

a third semiconductor fin in the dielectric layer; and

a third electrode in the dielectric layer above the third semiconductor fin, the third electrode being electrically connected to the first electrode, wherein top surfaces of the dielectric layer and the third electrode are level.

11. The integrated circuit of claim 10, further comprising:

a conductive line extending over the first, second, and third semiconductor fins;

a first conductive via electrically connecting the conductive line to the first electrode; and

a second conductive via electrically connecting the conductive line to the third electrode.

12. The integrated circuit of claim 11, further comprising:

a second conductive line extending over the first, second, and third semiconductor fins; and

a third conductive via electrically connecting the second conductive line to the second electrode.

13. The integrated circuit of claim 8, further comprising a finFET semiconductor fin in the dielectric layer, the finFET semiconductor fin having a finFET formed therein.

14. The integrated circuit of claim 13, further comprising:

a third semiconductor fin in the dielectric layer; and

a third electrode in the dielectric layer above the third semiconductor fin, the third electrode being electrically connected to the first electrode, wherein top surfaces of the dielectric layer and the third electrode are level.

15. The integrated circuit of claim 8, further comprising:

a dielectric liner around the first and second electrodes.

16. The integrated circuit of claim 15, wherein the dielectric liner is selected from a group consisting of silicon oxide or a metal oxide of Li, Be, Mg, Ca, Sr, Sc, Y, Zr, Hf, Al, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu and mixtures thereof.

17. An integrated circuit, comprising:

a substrate having a top major surface;

a capacitor dielectric layer above the top major surface of the substrate, the capacitor dielectric layer having a first, a second, and a third recess extending from a topmost surface of the capacitor dielectric layer to the substrate, wherein the second recess is between the first and third recesses;

a dielectric liner lining the first, the second, and the third recesses;

a conductor material filling the lined first, second, and third recesses, forming a first, a second, and third electrode, respectively, the first, the second, and the third electrodes extending substantially perpendicular to the top major surface of the substrate, the first and third electrodes being electrically insulated from the second electrode, the first, second, and third electrodes having top surfaces level with the topmost surface of the capacitor dielectric layer;

a first conductive line extending over the capacitor dielectric layer and the first, second, and third electrodes, the first conductive line being electrically connected to the first and third electrodes; and

a second conductive line extending over the capacitor dielectric layer and the first, second, and third electrodes, the second conductive line being electrically connected to the second electrode.

18. The integrated circuit of claim 17, further comprising a finFET fin extending from the top major surface of the substrate and a transistor formed in the finFET fin.

19. The integrated circuit of claim 17, wherein the dielectric liner is selected from a group consisting of silicon oxide or a metal oxide of Li, Be, Mg, Ca, Sr, Sc, Y, Zr, Hf, Al, La, Ce, Pr, Nd, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu and mixtures thereof.

20. The integrated circuit of claim 17, wherein liner dielectric has a thickness of from about 5 nm to about 15 nm.