Spin chuck with rotating gas showerhead

• US 10,167,552 B2
• Filed: 02/05/2015
• Issued: 01/01/2019
• Est. Priority Date: 02/05/2015
• Status: Active Grant

• Current Assignee: Lam Research AG (Lam Research Corporation)
• Original Assignee: Lam Research AG (Lam Research Corporation)
• Inventors: Gleissner, Andreas, Junk, Markus, Bandarapu, Bhaskar
• Primary Examiner(s): Cormier, David G
• Assistant Examiner(s): Bucci, Thomas
• Application Number:
  US14/615,099
• Publication Number:
  US 20160230278A1
• Time in Patent Office: 1,426 Days
• Field of Search: 134153, 134157, 134902, 134 33, 134149, 134 991, 134105, 134 34, 1341042, 134 26, 134137, 118715, 118725, 118730, 118724, 118 52, 118728
• CPC Class Codes: C23C 16/45519 Inert gas curtains
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: H01L 21/67115 mainly by radiation

Abstract

An apparatus for processing wafer-shaped articles comprises a spin chuck for holding a wafer-shaped article in a predetermined orientation, and a rotating shower head for supplying process gas to a surface of a wafer-shaped article when held by the spin chuck. The rotating shower head comprises an outlet plate having plural openings formed in each of a central and a peripheral region thereof. A process gas feed is provided so as to supply process gas to a gas distribution chamber. The gas distribution chamber is in fluid communication with a plurality of openings formed in the shower head.

Claims

1. An apparatus for processing wafer-shaped articles, comprising:

a closed process chamber;

a spin chuck for holding a wafer-shaped article in a predetermined orientation, said spin chuck including a plurality of downwardly-depending gripping pins arranged in a circular series and disposed within the closed process chamber,

a rotating shower head included within an upper dispense unit for supplying process gas to a first surface of a wafer-shaped article when held by said plurality of downwardly-depending gripping pins, said rotating shower head comprising an outlet plate having a plurality of openings formed in each of a central and a peripheral region thereof,

a process gas feed for supplying process gas to a gas distribution chamber defined within the closed process chamber, said gas distribution chamber being in fluid communication with said plurality of openings formed in said rotating shower head, and

a blocking gas feed for supplying blocking gas to a gap defined between an inner surface of said closed process chamber and an outer periphery of said spin chuck to confine process gas within said gas distribution chamber,

wherein each of said plurality of downwardly-depending gripping pins is configured to retain said wafer-shaped article such that a second surface of said wafer-shaped article is oriented with respect to a lower dispense unit.

2. The apparatus according to claim 1, wherein said outlet plate is affixed to said spin chuck and covers a central region thereof.

3. The apparatus according to claim 1, wherein the outlet plate is formed in one piece with at least a ring part of the spin chuck.

4. The apparatus according to claim 1, wherein each of said plurality of openings has a cross-sectional area in a range from 0.3 to 2.0 mm².

5. The apparatus according to claim 1, wherein said plurality of openings includes at least 50 of said openings.

6. The apparatus according to claim 1, wherein said plurality of openings are inclined so as to direct fluid passing from said gas distribution chamber through said plurality of openings radially outwardly of said spin chuck.

7. The apparatus according to claim 1, wherein said outlet plate is domed such that a central region thereof is positioned farther from a wafer-shaped article when positioned on said spin chuck than a peripheral region thereof.

8. The apparatus according to claim 1, wherein said outlet plate is formed of a ceramic material.

9. The apparatus according to claim 1, wherein said spin chuck is a magnetic rotor, said apparatus further comprising a magnetic stator surrounding said magnetic rotor.

10. The apparatus according to claim 1, wherein said gap comprises an annular gap between said inner surface of said closed process chamber and said outer periphery of said spin chuck to confine process gas within said gas distribution chamber.

11. An apparatus for processing wafer-shaped articles, comprising:

a closed process chamber,

a spin chuck disposed within the closed process chamber, the spin chuck for holding a wafer-shaped article in a predetermined orientation, said spin chuck including a plurality of downwardly-depending gripping pins arranged in a circular series,

a rotating shower head disposed within the closed process chamber for supplying process gas to a first surface of a wafer-shaped article when held by said plurality of downwardly-depending gripping pins, said rotating shower head comprising a domed outlet plate defining a plurality of openings in each of a central region and a peripheral region thereof such that said central region is positioned farther from said first surface than said peripheral region, and

a process gas feed for supplying process gas to a gas distribution chamber defined within said closed process chamber, said gas distribution chamber being in fluid communication with said plurality of openings,

wherein said spin chuck is a magnetic rotor, said apparatus further comprising a magnetic stator surrounding said magnetic rotor.

12. The apparatus according to claim 11, wherein said closed process chamber comprises a top wall having a peripheral region positioned above said magnetic rotor and a central region that extends downwardly within said magnetic rotor, and wherein an inner surface of said top wall and said domed outlet plate define said gas distribution chamber.

13. The apparatus according to claim 12, wherein the top wall is stationary.

14. The apparatus according to claim 11, further comprising a blocking gas feed for supplying blocking gas to a gap defined between a peripheral surface of said spin chuck and an inner surface of said closed process chamber, said gap being positioned so as to confine process gas within said gas distribution chamber.

15. The apparatus according to claim 11, further comprising a gas injection head positioned in a top wall of said closed process chamber and passing through a central opening in said domed outlet plate.

16. The apparatus according to claim 11, wherein the rotating shower head comprises a central opening through which liquid can be supplied towards the wafer-shaped article.

17. The apparatus according to claim 14, wherein said gap comprises an annular gap between said inner surface of said closed process chamber and said peripheral surface of said spin chuck to confine process gas within said gas distribution chamber.