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Thermal detector array configured to detect thermal radiation from the integrated circuit

  • US 10,168,222 B2
  • Filed: 03/30/2017
  • Issued: 01/01/2019
  • Est. Priority Date: 03/30/2017
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • an integrated circuit substrate;

    an integrated circuit, wherein the integrated circuit is disposed on a top surface of the integrated circuit substrate;

    a thermal detector array substrate;

    a thermal detector array configured to detect thermal radiation from the integrated circuit, wherein the thermal detector array is disposed on a bottom surface of the thermal detector array substrate; and

    one or more spacers disposed on the top surface of the integrated circuit substrate;

    wherein the one or more spacers are disposed between the top surface of the integrated circuit substrate and the bottom surface of the thermal detector array substrate.

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