Acceleration sensor having spring force compensation
First Claim
1. An acceleration sensor comprising:
- a sensor material which is mounted by means of spring elements so as to be movable along a movement axis (x) over a substratefirst trim electrodes which are connected to the sensor material, the first trim electrodes including comb electrodes comprised of electrode fingers and a region from which the electrode fingers extend; and
second trim electrodes formed as electrode plates and which are connected to the substrate and are associated with the first trim electrodes, whereinwhen the sensor material is deflected along the movement axis (x), a spring force acting on the sensor material is generated by the spring elements;
when the sensor material is deflected, an electrostatic force acting on the sensor material, which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes and the second trim electrodes,wherein a side of the region from which the electrode fingers extend forms plate capacitors with the associated second trim electrodes where the plate capacitors generate the electrostatic force.
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Accused Products
Abstract
The invention relates to an acceleration sensor (100) having a sensor material (120) which is mounted by means of spring elements (130) so as to be movable along a movement axis (x) over a substrate (110), first trim electrodes (140) which are connected to the sensor material (120), and second trim electrodes (150) which are connected to the substrate (110) and are associated with the first trim electrodes (140). When the sensor material is deflected along the movement axis, a spring force acting on the sensor material (120) is generated by the spring elements (130), and when the sensor material (120) is deflected, an electrostatic force acting on the sensor material (120), which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes (140) and the second trim elements (150).
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Citations
10 Claims
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1. An acceleration sensor comprising:
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a sensor material which is mounted by means of spring elements so as to be movable along a movement axis (x) over a substrate first trim electrodes which are connected to the sensor material, the first trim electrodes including comb electrodes comprised of electrode fingers and a region from which the electrode fingers extend; and second trim electrodes formed as electrode plates and which are connected to the substrate and are associated with the first trim electrodes, wherein when the sensor material is deflected along the movement axis (x), a spring force acting on the sensor material is generated by the spring elements; when the sensor material is deflected, an electrostatic force acting on the sensor material, which counteracts the spring force, is generated by application of an electrical trim voltage between the first trim electrodes and the second trim electrodes, wherein a side of the region from which the electrode fingers extend forms plate capacitors with the associated second trim electrodes where the plate capacitors generate the electrostatic force. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification