Apparatus and methods for investigating a sample surface
First Claim
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1. An apparatus for investigating a sample surface, the apparatus comprising:
- a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface;
an actuator configured to move the probe array towards the sample surface;
a light source configured to illuminate the probe tips with an illumination through the substrate; and
an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.
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Abstract
An apparatus for investigating a sample surface is disclosed. The apparatus comprises: a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips.
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Citations
14 Claims
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1. An apparatus for investigating a sample surface, the apparatus comprising:
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a probe array comprising a substrate and a plurality of probe tips extending from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; an actuator configured to move the probe array towards the sample surface; a light source configured to illuminate the probe tips with an illumination through the substrate; and an image capture device arranged to detect a change in intensity of the illumination reflected from the probe tips. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of investigating a sample surface, the method comprising
arranging a probe array over the sample surface, the probe array comprising a substrate and a plurality of probe tips from the substrate, the probe tips comprising a transparent and deformable material and configured to contact the sample surface; -
illuminating the probe tips with an illumination through the substrate; moving the probe array relative to the sample surface; detecting a timing of a change in intensity of the illumination reflected from each probe tip of the plurality of probe tips; and determining a property of the sample surface from the timing of the change in intensity of the illumination reflected from each probe tip of the plurality of probe tips. - View Dependent Claims (10, 11, 12, 13, 14)
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Specification