On-axis illumination and alignment for charge control during charged particle beam inspection
First Claim
1. A charged particle beam apparatus, comprising:
- a charged particle source configured to generate charged particles;
an electrode configured to accelerate the charged particles to form a charged particle beam;
a bender unit configured to adjust a path of the charged particle beam;
an objective lens configured to focus the charged particle beam onto a spot on a sample, the charged particle beam passing through a bore of the objective lens as the charged particle beam propagates from the charged particle source to the sample;
a light source configured to generate a light beam;
a mirror disposed within the bender unit and arranged to direct the light beam to the spot on the sample;
a sample support configured to support the sample, the sample support having a pinhole extending through a central region; and
a light sensor disposed on an opposite side of the sample support from the objective lens, the light sensor configured to sense light when the light beam is aligned with the pinhole.
2 Assignments
0 Petitions
Accused Products
Abstract
A charged particle beam apparatus includes a charged particle source configured to generate charged particles, an electrode configured to accelerate the charged particles to form a charged particle beam, a bender unit configured to adjust a path of the charged particle beam, and an objective lens configured to focus the charged particle beam onto a spot on a sample. The charged particle beam passes through a bore of the objective lens as the charged particle beam propagates from the charged particle source to the sample. The apparatus also includes a light source configured to generate a light beam, and a mirror disposed within the bender unit and arranged to direct the light beam to the spot on the sample.
-
Citations
18 Claims
-
1. A charged particle beam apparatus, comprising:
-
a charged particle source configured to generate charged particles; an electrode configured to accelerate the charged particles to form a charged particle beam; a bender unit configured to adjust a path of the charged particle beam; an objective lens configured to focus the charged particle beam onto a spot on a sample, the charged particle beam passing through a bore of the objective lens as the charged particle beam propagates from the charged particle source to the sample; a light source configured to generate a light beam; a mirror disposed within the bender unit and arranged to direct the light beam to the spot on the sample; a sample support configured to support the sample, the sample support having a pinhole extending through a central region; and a light sensor disposed on an opposite side of the sample support from the objective lens, the light sensor configured to sense light when the light beam is aligned with the pinhole. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
-
-
10. A method of scanning a sample, the method comprising:
-
generating charged particles using a charged particle source; accelerating the charged particles using an electrode to form a charged particle beam; adjusting a path of the charged particle beam using a bender unit; focusing the charged particle beam onto a spot on the sample using an objective lens, the charged particle beam passing through a bore of the objective lens as the charged particle beam propagates from the charged particle source to the sample; generating a light beam using a light source; directing the light beam through the bore of the objective lens using a mirror disposed within the bender unit, the light beam directed to the spot on the sample; and adjusting a position of the mirror to align the light beam with the spot on the sample. - View Dependent Claims (11, 12)
-
-
13. A method of aligning a charged particle beam of a charged particle apparatus with a light beam, the method comprising:
-
generating charged particles using a charged particle source; accelerating the charged particles using an electrode to form the charged particle beam; adjusting a path of the charged particle beam using a bender unit; focusing the charged particle beam onto a sample support using an objective lens, the charged particle beam passing through a bore of the objective lens as the charged particle beam propagates from the charged particle source to the sample support; scanning the charged particle beam across a surface of the sample support; detecting charged particles emitted or reflected from the sample support during scanning to identify a pinhole in the sample support; adjusting the path of the charged particle beam to be substantially aligned with the pinhole; generating the light beam using a light source; directing the light beam toward the surface of the sample using a mirror disposed within the bender unit; detecting the light beam using a light sensor when the light beam is aligned with the pinhole; and adjusting a path of the light beam to be substantially aligned with the pinhole. - View Dependent Claims (14, 15, 16, 17, 18)
-
Specification