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Systems, devices, and methods for providing feedback on and improving the accuracy of super-resolution imaging

  • US 10,169,852 B1
  • Filed: 07/03/2018
  • Issued: 01/01/2019
  • Est. Priority Date: 07/03/2018
  • Status: Active Grant
First Claim
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1. A method for generating a super-resolution image for a specimen through a super-resolution system based on a low resolution image of the specimen comprising:

  • obtaining the low resolution image of the specimen using a low resolution objective of a microscopy inspection system;

    generating the super-resolution image of at least a portion of the specimen from the low resolution image of the specimen using a super-resolution image simulation;

    identifying an accuracy assessment of the super-resolution image based on one or more degrees of equivalence between the super-resolution image and one or more actually scanned high resolution images of at least a portion of one or more related specimens identified using a simulated image classifier;

    determining whether to further process the super-resolution image based on the accuracy assessment of the super-resolution image;

    obtaining one or more high resolution images of the at least the portion of the specimen using a high resolution objective of the microscopy inspection system, if it is determined to further process the super-resolution image based on the accuracy assessment of the super-resolution image;

    assembling the super-resolution image and the one or more high resolution images of the at least the portion of the specimen to form a single coherent image of the at least the portion of the specimen as part of further processing the super-resolution image;

    identifying a total number of artifacts in the single coherent image of the at least the portion of the specimen;

    comparing the total number of artifacts in the single coherent image with a pre-defined tolerance number of artifacts to determine a relation of the total number of artifacts in the single coherent image with the pre-defined tolerance number of artifacts; and

    further controlling operation of the super-resolution system to generate one or more high resolution images for the specimen based on one or more low resolution images of the specimen according to the relation of the total number of artifacts in the single coherent image with the pre-defined tolerance number of artifacts.

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