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Self-aligned nanotube structures

  • US 10,170,304 B1
  • Filed: 10/25/2017
  • Issued: 01/01/2019
  • Est. Priority Date: 10/25/2017
  • Status: Active Grant
First Claim
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1. A structure, comprising at least one nanotube structure between adjacent fin structures and supported by a plurality of spacers, and an insulator material between the spacers which contacts the spacers at a bottom surface thereof, the spacers and the insulator material lining the adjacent fin structures.

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