Epi-poly etch stop for out of plane spacer defined electrode
First Claim
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1. A device with an out-of-plane electrode comprising:
- a device layer positioned above a handle layer;
a first electrode defined within the device layer;
a cap layer having a first cap layer portion spaced apart from an upper surface of the device layer by a gap, and having an etch stop perimeter defining portion defining a lateral edge of the gap; and
an out-of-plane electrode defined within the first cap layer portion by a permanent spacer.
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Abstract
A device with an out-of-plane electrode includes a device layer positioned above a handle layer, a first electrode defined within the device layer, a cap layer having a first cap layer portion spaced apart from an upper surface of the device layer by a gap, and having an etch stop perimeter defining portion defining a lateral edge of the gap, and an out-of-plane electrode defined within the first cap layer portion by a spacer.
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Citations
3 Claims
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1. A device with an out-of-plane electrode comprising:
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a device layer positioned above a handle layer; a first electrode defined within the device layer; a cap layer having a first cap layer portion spaced apart from an upper surface of the device layer by a gap, and having an etch stop perimeter defining portion defining a lateral edge of the gap; and an out-of-plane electrode defined within the first cap layer portion by a permanent spacer. - View Dependent Claims (2, 3)
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Specification