System and method for a MEMS sensor
First Claim
1. A method of performing a measurement using a micro-electro-mechanical system (MEMS) device comprising a first MEMS sensor array comprising a first plurality of capacitive MEMS pressure sensors coupled between a first excitation node and a first output node, a first reference capacitor coupled between the first output node and a second excitation node, a second capacitive MEMS sensor array comprising a second plurality of capacitive MEMS pressure sensors coupled between the second excitation node and a second output node, and a second reference capacitor coupled between the first excitation node and the second output node, wherein each of the first plurality of capacitive MEMS pressure sensors have different resonant frequencies, each of the second plurality of capacitive MEMS pressure sensors have different resonant frequencies, at least two of the first plurality of capacitive MEMS pressure sensors are coupled in parallel, and at least two of the second plurality of capacitive MEMS pressure sensors are coupled in parallel, the method comprising:
- applying an excitation signal between the first excitation node and the second excitation node of the MEMS device, wherein each of the first plurality of the capacitive MEMS pressure sensors and each of the second plurality of capacitive MEMS pressure sensors are stimulated by the excitation signal;
measuring a signal between the first output node and the second output node of the MEMS device, wherein the first output node of the MEMS device comprises a single node electrically connected to the at least two of the first plurality of capacitive MEMS pressure sensors, the second output node of the MEMS device comprises a single node electrically connected to the at least two of the second plurality of capacitive MEMS pressure sensors, and a combined response of the first plurality of capacitive MEMS pressure sensors and the second plurality of capacitive MEMS pressure sensors is configured to reduce output ringing between the first output node and the second output node; and
determining a measured value based on the measuring the signal.
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Abstract
An embodiment includes a method of performing a measurement using a micro-electro-mechanical system (MEMS) device that includes a plurality of MEMS sensors having different resonant frequencies. The method includes applying an excitation signal to a first port of the MEMS device such that each of the plurality of the MEMS sensors is stimulated by the excitation signal. The method further includes measuring a signal at a second port of the MEMS device and determining a measured value based on the measuring the signal.
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Citations
25 Claims
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1. A method of performing a measurement using a micro-electro-mechanical system (MEMS) device comprising a first MEMS sensor array comprising a first plurality of capacitive MEMS pressure sensors coupled between a first excitation node and a first output node, a first reference capacitor coupled between the first output node and a second excitation node, a second capacitive MEMS sensor array comprising a second plurality of capacitive MEMS pressure sensors coupled between the second excitation node and a second output node, and a second reference capacitor coupled between the first excitation node and the second output node, wherein each of the first plurality of capacitive MEMS pressure sensors have different resonant frequencies, each of the second plurality of capacitive MEMS pressure sensors have different resonant frequencies, at least two of the first plurality of capacitive MEMS pressure sensors are coupled in parallel, and at least two of the second plurality of capacitive MEMS pressure sensors are coupled in parallel, the method comprising:
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applying an excitation signal between the first excitation node and the second excitation node of the MEMS device, wherein each of the first plurality of the capacitive MEMS pressure sensors and each of the second plurality of capacitive MEMS pressure sensors are stimulated by the excitation signal; measuring a signal between the first output node and the second output node of the MEMS device, wherein the first output node of the MEMS device comprises a single node electrically connected to the at least two of the first plurality of capacitive MEMS pressure sensors, the second output node of the MEMS device comprises a single node electrically connected to the at least two of the second plurality of capacitive MEMS pressure sensors, and a combined response of the first plurality of capacitive MEMS pressure sensors and the second plurality of capacitive MEMS pressure sensors is configured to reduce output ringing between the first output node and the second output node; and determining a measured value based on the measuring the signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A system comprising:
a micro-electro-mechanical system (MEMS) sensor array comprising a bridge, the bridge comprising a first MEMS sensor array comprising a first plurality of capacitive MEMS pressure sensors coupled between a first excitation node and a first output node, a first reference capacitor coupled between the first output node and a second excitation node, a second capacitive MEMS sensor array comprising a second plurality of capacitive MEMS pressure sensors coupled between the second excitation node and a second output node, and a second reference capacitor coupled between the first excitation node and the second output node, wherein each of the first plurality of capacitive MEMS pressure sensors have different resonant frequencies, each of the second plurality of capacitive MEMS pressure sensors have different resonant frequencies, at least two of the first plurality of capacitive MEMS pressure sensors are coupled in parallel, and at least two of the second plurality of capacitive MEMS pressure sensors are coupled in parallel, wherein a combined response of the first plurality of capacitive MEMS pressure sensors and the second plurality of capacitive MEMS pressure sensors reduces output ringing at an output of the bridge. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21)
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22. A system comprising:
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a MEMS device comprising a first MEMS sensor array comprising a first plurality of capacitive MEMS pressure sensors coupled between a first excitation node and a first output node, a first reference capacitor coupled between the first output node and a second excitation node, a second capacitive MEMS sensor array comprising a second plurality of capacitive MEMS pressure sensors coupled between the second excitation node and a second output node, and a second reference capacitor coupled between the first excitation node and the second output node, wherein each of the first plurality of capacitive MEMS pressure sensors have different resonant frequencies, each of the second plurality of capacitive MEMS pressure sensors have different resonant frequencies, at least two of the first plurality of capacitive MEMS pressure sensors are coupled in parallel, and at least two of the second plurality of capacitive MEMS pressure sensors are coupled in parallel; an excitation signal generator coupled between the first excitation node and the second excitation node of the MEMS device, the excitation signal generator configured to produce an excitation signal, wherein each of the first plurality of the capacitive MEMS pressure sensors and each of the second plurality of capacitive MEMS pressure sensors are configured to be stimulated by the excitation signal; and a measurement circuit coupled between the first output node and the second output node of the MEMS device, wherein the first output node of the MEMS device comprises a single node electrically connected to the at least two of the first plurality of capacitive MEMS pressure sensors, the second output node of the MEMS device comprises a single node electrically connected to the at least two of the second plurality of capacitive MEMS pressure sensors, and a combined response of the first plurality of capacitive MEMS pressure sensors and the second plurality of capacitive MEMS pressure sensors is configured to reduce output ringing between the first output node and the second output node. - View Dependent Claims (23, 24, 25)
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Specification