System and method for a MEMS sensor

• US 10,175,130 B2
• Filed: 03/18/2016
• Issued: 01/08/2019
• Est. Priority Date: 04/20/2015
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Kollias, Athanasios, Herrmann, Matthias Friedrich, Ebner, Christian, Romani, Ernesto, Mechnig, Stephan, Hufschmitt, Joseph, Wiesbauer, Andreas, Jenkner, Christian
• Primary Examiner(s): Shah, Manish S
• Assistant Examiner(s): Morello, Jean
• Application Number:
  US15/074,649
• Publication Number:
  US 20160305835A1
• Time in Patent Office: 1,026 Days
• Field of Search: 73724, 73718, 73579-587, 73651
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm
• CPC Class Codes: G01L 9/12 by making use of variations in capacitance , i.e. electric circuits therefor

Abstract

An embodiment includes a method of performing a measurement using a micro-electro-mechanical system (MEMS) device that includes a plurality of MEMS sensors having different resonant frequencies. The method includes applying an excitation signal to a first port of the MEMS device such that each of the plurality of the MEMS sensors is stimulated by the excitation signal. The method further includes measuring a signal at a second port of the MEMS device and determining a measured value based on the measuring the signal.

Claims

1. A method of performing a measurement using a micro-electro-mechanical system (MEMS) device comprising a first MEMS sensor array comprising a first plurality of capacitive MEMS pressure sensors coupled between a first excitation node and a first output node, a first reference capacitor coupled between the first output node and a second excitation node, a second capacitive MEMS sensor array comprising a second plurality of capacitive MEMS pressure sensors coupled between the second excitation node and a second output node, and a second reference capacitor coupled between the first excitation node and the second output node, wherein each of the first plurality of capacitive MEMS pressure sensors have different resonant frequencies, each of the second plurality of capacitive MEMS pressure sensors have different resonant frequencies, at least two of the first plurality of capacitive MEMS pressure sensors are coupled in parallel, and at least two of the second plurality of capacitive MEMS pressure sensors are coupled in parallel, the method comprising:

applying an excitation signal between the first excitation node and the second excitation node of the MEMS device, wherein each of the first plurality of the capacitive MEMS pressure sensors and each of the second plurality of capacitive MEMS pressure sensors are stimulated by the excitation signal;

measuring a signal between the first output node and the second output node of the MEMS device, wherein the first output node of the MEMS device comprises a single node electrically connected to the at least two of the first plurality of capacitive MEMS pressure sensors, the second output node of the MEMS device comprises a single node electrically connected to the at least two of the second plurality of capacitive MEMS pressure sensors, and a combined response of the first plurality of capacitive MEMS pressure sensors and the second plurality of capacitive MEMS pressure sensors is configured to reduce output ringing between the first output node and the second output node; and

determining a measured value based on the measuring the signal.

2. The method of claim 1, wherein the measured value comprises a pressure.

3. The method of claim 1, each of the first plurality of the capacitive MEMS pressure sensors comprises different size dimensions, and each of the second plurality of capacitive MEMS pressure sensors comprises different size dimensions.

4. The method of claim 3, wherein the size dimensions vary by about +/−

7.5%.

5. The method of claim 3, wherein the size dimensions are evenly distributed.

6. The method of claim 1, wherein a transient response of the MEMS device comprises ringing at the different resonant frequencies, and the ringing comprises time intervals of constructive interference and intervals of destructive interference.

7. The method of claim 1, wherein measuring a signal between the first output node and the second output node of the MEMS device comprises performing an A/D conversion.

8. The method of claim 7, wherein measuring a signal between the first output node and the second output node of the MEMS device comprises measuring the signal between the first output node and the second output node of the MEMS device during an interval of destructive interference.

9. The method of claim 8, wherein measuring the signal further comprises sampling the signal during the interval of destructive interference.

10. The method of claim 8, wherein measuring the signal further comprises performing an A/D conversion of the signal during the interval of destructive interference.

11. The method of claim 1, wherein the excitation signal comprises a square wave excitation signal.

12. The method of claim 1, wherein the measured value comprises a digital measurement sample.

13. A system comprising:

a micro-electro-mechanical system (MEMS) sensor array comprising a bridge, the bridge comprising a first MEMS sensor array comprising a first plurality of capacitive MEMS pressure sensors coupled between a first excitation node and a first output node, a first reference capacitor coupled between the first output node and a second excitation node, a second capacitive MEMS sensor array comprising a second plurality of capacitive MEMS pressure sensors coupled between the second excitation node and a second output node, and a second reference capacitor coupled between the first excitation node and the second output node, wherein each of the first plurality of capacitive MEMS pressure sensors have different resonant frequencies, each of the second plurality of capacitive MEMS pressure sensors have different resonant frequencies, at least two of the first plurality of capacitive MEMS pressure sensors are coupled in parallel, and at least two of the second plurality of capacitive MEMS pressure sensors are coupled in parallel, wherein a combined response of the first plurality of capacitive MEMS pressure sensors and the second plurality of capacitive MEMS pressure sensors reduces output ringing at an output of the bridge.

14. The system of claim 13, wherein the first plurality of capacitive MEMS pressure sensors are rectangular.

15. The system of claim 13, wherein the first plurality of capacitive MEMS pressure sensors each have different dimensions.

16. The system of claim 15, wherein the different dimensions comprise different lengths.

17. The system of claim 16, wherein the different lengths have a variation of about +/−

7.5%.

18. The system of claim 13, further comprising:

an excitation generator having an output coupled between the first excitation node and the second excitation node; and

a measurement circuit having an input coupled between the first output node and the second output node.

19. The system of claim 18, wherein the measurement circuit comprises an A/D converter.

20. The system of claim 19, further comprising a filter coupled to an output of the A/D converter.

21. The system of claim 20, wherein the filter comprises a low pass filter.

22. A system comprising:

a MEMS device comprising a first MEMS sensor array comprising a first plurality of capacitive MEMS pressure sensors coupled between a first excitation node and a first output node, a first reference capacitor coupled between the first output node and a second excitation node, a second capacitive MEMS sensor array comprising a second plurality of capacitive MEMS pressure sensors coupled between the second excitation node and a second output node, and a second reference capacitor coupled between the first excitation node and the second output node, wherein each of the first plurality of capacitive MEMS pressure sensors have different resonant frequencies, each of the second plurality of capacitive MEMS pressure sensors have different resonant frequencies, at least two of the first plurality of capacitive MEMS pressure sensors are coupled in parallel, and at least two of the second plurality of capacitive MEMS pressure sensors are coupled in parallel;

an excitation signal generator coupled between the first excitation node and the second excitation node of the MEMS device, the excitation signal generator configured to produce an excitation signal, wherein each of the first plurality of the capacitive MEMS pressure sensors and each of the second plurality of capacitive MEMS pressure sensors are configured to be stimulated by the excitation signal; and

a measurement circuit coupled between the first output node and the second output node of the MEMS device, wherein the first output node of the MEMS device comprises a single node electrically connected to the at least two of the first plurality of capacitive MEMS pressure sensors, the second output node of the MEMS device comprises a single node electrically connected to the at least two of the second plurality of capacitive MEMS pressure sensors, and a combined response of the first plurality of capacitive MEMS pressure sensors and the second plurality of capacitive MEMS pressure sensors is configured to reduce output ringing between the first output node and the second output node.

23. The system of claim 22, wherein the measurement circuit is configured to measure a signal between the first output node and the second output node of the MEMS device during an interval of destructive interference.

24. The system of claim 22, wherein the measurement circuit comprises an A/D converter.

25. The system of claim 22, wherein the excitation signal comprises a square wave excitation signal.