MEMS resonator

• US 10,177,733 B2
• Filed: 05/12/2016
• Issued: 01/08/2019
• Est. Priority Date: 12/11/2015
• Status: Active Grant

• Current Assignee: Hyundai Motor Company (Hyundai Motor Group)
• Original Assignee: Hyundai Motor Company (Hyundai Motor Group)
• Inventors: Yoo, Ilseon
• Primary Examiner(s): Summons, Barbara
• Application Number:
  US15/152,866
• Publication Number:
  US 20170170802A1
• Time in Patent Office: 971 Days
• Field of Search: 333186, 333188
• CPC Class Codes: B81B 2201/0271 Resonators; ultrasonic resonators
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 2203/0136 Comb structures
• CPC Class Codes: B81B 2207/015 the micromechanical device and the control or processing electronics being integrated on the same substrate
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: H03H 2009/02165 Tuning
• CPC Class Codes: H03H 2009/02291 Beams
• CPC Class Codes: H03H 9/02244 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/02275 Comb electrodes
• CPC Class Codes: H03H 9/02393 Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
• CPC Class Codes: H03H 9/02409 by application of a DC-bias voltage H03H9/02417 takes precedence
• CPC Class Codes: H03H 9/2447 Beam resonators H03H9/2468 takes precedence

Abstract

A MEMS resonator includes a main substrate forming a receiving part at a center of the main substrate; a mass body having one end part and a center part elastically supported by both sides of the main substrate; a driving unit configured at one side of the receiving part on the main substrate and producing a driving force by a voltage applied to both sides of the one end part of the mass body to move a position of the mass body with respect to the main substrate; and a tuning part including a pair of tuning units provided symmetrically with respect to the second elastic member, and having a beam member changing a length of the second elastic member by an actuating operation of each tuning unit to control a frequency.

Claims

1. A MEMS resonator, comprising:

a main substrate forming a receiving part at a center of the main substrate;

a mass body positioned at a center of the receiving part on the main substrate and having one end part and a center part elastically supported by both sides of the main substrate through a first elastic member and a second elastic member;

a driving unit configured at one side of the receiving part on the main substrate and producing a driving force by a voltage applied to both sides of the one end part of the mass body to move a position of the mass body with respect to the main substrate; and

a tuning part including a pair of tuning units provided symmetrically with respect to the second elastic member, respectively configured at the receiving part by corresponding to both sides of the center part of the mass body, and having a beam member changing a length of the second elastic member by an actuating operation of each of the pair of tuning units to control a frequency.

2. The MEMS resonator of claim 1, wherein each of the pair of tuning units includes:

an auxiliary substrate configured inside the receiving part of the main substrate by corresponding to the center part of the mass body;

a first actuator configured in the receiving part between the auxiliary substrate and the main substrate and driving each of contact ends of the first actuator positioned at both sides with respect to a shuttle positioned at the center of the receiving part depending on an application voltage to control a movement of the shuttle; and

a second actuator positioned at a rear part of the first actuator in the opposite side of the second elastic member and configured with a driving beam on a plurality of heating lines extending by an application voltage to act on the rear end of the shuttle,

wherein the beam member is positioned to enable contact with the second elastic member inside the receiving part between the auxiliary substrate and the main substrate and is fixed to a front end of the shuttle.

3. The MEMS resonator of claim 2, wherein in the shuttle, the front end part is connected to a third elastic member disposed between the auxiliary substrate and the main substrate.

4. The MEMS resonator of claim 2, wherein the first actuator includes the shuttle positioned at the center of the receiving part between the auxiliary substrate and the main substrate, is disposed respectively corresponding to the auxiliary substrate and the main substrate at both sides of the shuttle to form each of the contact ends contacting the shuttle at each inner end, and has a deformation part made of a first beam and a second beam connected to respective electrodes to which a voltage may be applied to deform each of the contact ends and release each inner end from contacting the shuttle.

5. The MEMS resonator of claim 4, wherein the first beam is disposed at both sides corresponding to the shuttle, the second beam is formed with the same thickness outside the first beam at the opposite side of each of the contact ends, and the second beam is shorter than the first beam.

6. The MEMS resonator of claim 2, wherein each of the contact ends of the first actuator and the shuttle corresponding to the contact ends is coated with carbon nanotubes (CNTs).

7. The MEMS resonator of claim 2, wherein in the second actuator, the plurality of heating lines are integrally connected on both ends by a supporting end, a driving beam is configured at the center part of each heating line, and the driving beam contacts the rear end of the shuttle by an extending change amount of each heating line to drive the shuttle.

8. The MEMS resonator of claim 2, wherein the beam member is formed with a curved surface of an oval shape.

9. The MEMS resonator of claim 1, wherein the main substrate is a silicon-on-insulator (SOI) substrate.

10. The MEMS resonator of claim 1, wherein the driving unit is made as a comb finger driver.