MEMS resonator
First Claim
1. A MEMS resonator, comprising:
- a main substrate forming a receiving part at a center of the main substrate;
a mass body positioned at a center of the receiving part on the main substrate and having one end part and a center part elastically supported by both sides of the main substrate through a first elastic member and a second elastic member;
a driving unit configured at one side of the receiving part on the main substrate and producing a driving force by a voltage applied to both sides of the one end part of the mass body to move a position of the mass body with respect to the main substrate; and
a tuning part including a pair of tuning units provided symmetrically with respect to the second elastic member, respectively configured at the receiving part by corresponding to both sides of the center part of the mass body, and having a beam member changing a length of the second elastic member by an actuating operation of each of the pair of tuning units to control a frequency.
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Abstract
A MEMS resonator includes a main substrate forming a receiving part at a center of the main substrate; a mass body having one end part and a center part elastically supported by both sides of the main substrate; a driving unit configured at one side of the receiving part on the main substrate and producing a driving force by a voltage applied to both sides of the one end part of the mass body to move a position of the mass body with respect to the main substrate; and a tuning part including a pair of tuning units provided symmetrically with respect to the second elastic member, and having a beam member changing a length of the second elastic member by an actuating operation of each tuning unit to control a frequency.
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Citations
10 Claims
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1. A MEMS resonator, comprising:
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a main substrate forming a receiving part at a center of the main substrate; a mass body positioned at a center of the receiving part on the main substrate and having one end part and a center part elastically supported by both sides of the main substrate through a first elastic member and a second elastic member; a driving unit configured at one side of the receiving part on the main substrate and producing a driving force by a voltage applied to both sides of the one end part of the mass body to move a position of the mass body with respect to the main substrate; and a tuning part including a pair of tuning units provided symmetrically with respect to the second elastic member, respectively configured at the receiving part by corresponding to both sides of the center part of the mass body, and having a beam member changing a length of the second elastic member by an actuating operation of each of the pair of tuning units to control a frequency. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification