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Microelectromechanical gyroscope with rejection of disturbances and method of sensing an angular rate

  • US 10,180,324 B2
  • Filed: 06/29/2016
  • Issued: 01/15/2019
  • Est. Priority Date: 12/29/2015
  • Status: Active Grant
First Claim
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1. A microelectromechanical gyroscope comprising:

  • a substrate;

    a first structure, a second structure and a third structure, each of the first, the second, and the third structures elastically coupled to the substrate to be movable in a driving direction along a first axis, the first structure and the second structure being arranged at opposite sides of the third structure with respect to the first axis; and

    a driving system configured to oscillate the first structure and the second structure along the first axis in phase with one another and to oscillate the third structure along the first axis in phase opposition with the first structure and the second structure;

    the first structure, the second structure and the third structure being provided with respective sets of movable sensing electrodes configured to be displaced in a sensing direction along a second axis perpendicular to the first axis in response to rotations of the substrate about a third axis perpendicular to the first axis and to the second axis,wherein the third structure includes a first portion and a second portion rigidly connected to each other, the first portion being symmetric with respect to the first structure, the second portion being symmetric with respect to the second structure.

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