Mass transfer tool manipulator assembly with remote center of compliance
First Claim
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1. A remote center robot, comprising:
- a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm;
a second linkage mounted on the first linkage, the second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm, wherein the first axis and the second axis intersect at a remote rotational center on a z-axis;
wherein the first axis and the z-axis extend within a first plane, and wherein the second axis and the z-axis extend within a second plane, and wherein the first plane is offset from the second plane by an angle; and
a first linear actuator having a first end fixed relative to the first upper joint, wherein actuation of the first linear actuator changes a first angle between the first axis and the z-axis.
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Abstract
Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.
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Citations
16 Claims
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1. A remote center robot, comprising:
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a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm; a second linkage mounted on the first linkage, the second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm, wherein the first axis and the second axis intersect at a remote rotational center on a z-axis; wherein the first axis and the z-axis extend within a first plane, and wherein the second axis and the z-axis extend within a second plane, and wherein the first plane is offset from the second plane by an angle; and a first linear actuator having a first end fixed relative to the first upper joint, wherein actuation of the first linear actuator changes a first angle between the first axis and the z-axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A remote center robot, comprising:
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a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm; a second linkage mounted on the first linkage, the second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm, wherein the first axis and the second axis intersect at a remote rotational center on a z-axis; a z-flexure including an upper mount coupled with a bottom portion of the second linkage and a lower mount, such that the remote rotational center is below the lower mount; a distribution plate coupled with the lower mount of the z-flexure; and an insulator between the lower mount and the z-flexure. - View Dependent Claims (13, 14, 15)
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16. A remote center robot, comprising:
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a first linkage having a first upper joint and a first lower joint separated along a first axis by a first link arm; and a second linkage mounted on the first linkage, the second linkage having a second upper joint and a second lower joint separated along a second axis by a second link arm, wherein the first axis and the second axis intersect at a remote rotational center on a z-axis; wherein the first and second upper joints and the first and second lower joints include a plurality of living hinges; wherein a first combined stiffness of the first linkage is equal to a second combined stiffness of the second linkage.
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Specification