MEMS pressure sensor with multiple membrane electrodes

• US 10,183,857 B2
• Filed: 08/19/2013
• Issued: 01/22/2019
• Est. Priority Date: 08/21/2012
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Graham, Andrew, Feyh, Ando, Gehl, Bernhard
• Primary Examiner(s): Muse, Ismail A
• Application Number:
  US13/969,840
• Publication Number:
  US 20140054731A1
• Time in Patent Office: 1,982 Days
• CPC Class Codes: B81B 3/0081 Thermal properties
• CPC Class Codes: B81C 1/00158 Diaphragms, membranes manufacture process for semi-permeable inorganic membranes B01D67/0039
• CPC Class Codes: G01D 5/2417 by varying separation
• CPC Class Codes: G01L 9/0073 using a semiconductive diaphragm

Abstract

In one embodiment, a MEMS sensor includes a first fixed electrode in a first layer, a cavity defined above the first fixed electrode, a membrane extending over the cavity, a first movable electrode defined in the membrane and located substantially directly above the first fixed electrode, and a second movable electrode defined at least partially within the membrane and located at least partially directly above the cavity.

Claims

1. A MEMS sensor comprising:

a substrate layer;

a first fixed electrode defined in the substrate layer;

a second fixed electrode;

a cavity defined above the first fixed electrode;

a membrane extending over the cavity and supported by the substrate layer;

a first movable electrode defined in the membrane and located substantially directly above the first fixed electrode; and

a second movable electrode defined at least partially within the membrane and located at least partially directly above the cavity and the second fixed electrode, wherein no portion of the second movable electrode is located directly above the first fixed electrode.

2. The MEMS sensor of claim 1, wherein the first movable electrode and the second movable electrode are concentric.

3. The MEMS sensor of claim 2, wherein:

the second fixed electrode is defined in the substrate layer;

no portion of the first movable electrode is located directly above the second fixed electrode; and

a lead line extends from the first movable electrode directly over a portion of the second fixed electrode.

4. The MEMS sensor of claim 2, further comprising:

a third movable electrode defined in the membrane and located directly above the cavity, wherein no portion of the third movable electrode is not located directly above the first fixed electrode or the second fixed electrode.

5. The MEMS sensor of claim 4, further comprising:

a third fixed electrode defined in the substrate layer and directly beneath the third movable electrode.

6. The MEMS sensor of claim 1, wherein the first movable electrode and the second movable electrode are interdigitated.

7. The MEMS sensor of claim 1, wherein:

the first movable electrode is located in a central portion of the membrane;

the second movable electrode is located in an outer portion of the membrane; and

the outer portion of the membrane surrounds the inner portion of the membrane.

8. The MEMS sensor of claim 7, further comprising:

a third movable electrode located in the central portion of the membrane; and

a fourth movable electrode located in the outer portion of the membrane.

9. The MEMS sensor of claim 8, further comprising:

a fifth movable electrode located in the central portion of the membrane;

a sixth movable electrode located in the central portion of the membrane;

a seventh movable electrode located in the outer portion of the membrane; and

an eighth movable electrode located in the outer portion of the membrane.

10. A method of forming a MEMS sensor comprising:

forming a first fixed electrode in a first layer;

forming a second fixed electrode in the first layer;

forming a membrane layer above the first layer such that the first layer supports the membrane layer;

forming a first movable electrode in the formed membrane layer and located substantially directly above the formed first fixed electrode;

forming a second movable electrode in the membrane layer at a location at least partially directly above the formed second fixed electrode, wherein no portion of the second movable electrode is located directly above the first fixed electrode; and

forming a cavity between the first layer and the membrane layer, the cavity extending beneath the first movable electrode and at least partially beneath the second movable electrode.

11. The method of claim 10, wherein the first movable electrode and the second movable electrode are formed concentrically.

12. The method of claim 11, wherein forming the second fixed electrode comprises:

forming the second fixed electrode in the first layer at the same time as the first electrode is formed.

13. The method of claim 11, further comprising:

forming a third movable electrode in the membrane layer at a location such that no portion of the third moveable electrode is directly above the first fixed electrode or the second fixed electrode, wherein forming the cavity further comprises forming the cavity beneath the third movable electrode.

14. The method of claim 13, further comprising:

forming a third fixed electrode in the first layer such that the third movable electrode is directly above the third movable electrode.

15. The method of claim 10, wherein forming the first movable electrode and forming the second moveable electrode comprises forming interdigitated first and second movable electrodes.

16. The method of claim 10, wherein:

forming the first movable electrode comprises forming the first movable electrode in a central portion of the membrane layer such that no portion of the first movable electrode is located directly above the second fixed electrode, and with a lead line extending from the first moveable electrode and over a portion of the second fixed electrode;

forming the second movable electrode comprises forming the second movable electrode in an outer portion of the membrane layer; and

the outer portion of the membrane layer surrounds the inner portion of the membrane layer.

17. The method of claim 16, further comprising:

forming a third movable electrode in the central portion of the membrane layer; and

forming a fourth movable electrode in the outer portion of the membrane layer.

18. The MEMS sensor of claim 17, further comprising:

forming a fifth movable electrode in the central portion of the membrane layer;

forming a sixth movable electrode in the central portion of the membrane layer;

forming a seventh movable electrode in the outer portion of the membrane layer; and

forming an eighth movable electrode in the outer portion of the membrane layer.

19. A MEMS pressure system comprising:

a MEMS sensor including

a first fixed electrode in a first layer,

a second fixed electrode in the first layer,

a cavity defined above the first fixed electrode and the second fixed electrode,

a membrane extending over the cavity,

a first movable electrode defined in the membrane and located substantially directly above the first fixed electrode, and

a second movable electrode defined at least partially within the membrane and located at least partially directly above the second fixed electrode, wherein no portion of the second movable electrode is directly above the first fixed electrode;

a memory including program instructions stored therein; and

a processor operably connected to the MEMS sensor and the memory and configured to execute the program instructions to

obtain a first signal from the MEMS sensor using the first movable electrode,

obtaining a second signal from the MEMS sensor using the second movable electrode, and

determine a pressure based upon the first signal and the second signal.

20. The MEMS pressure system of claim 19, wherein no portion of the first movable electrode is located directly above the second fixed electrode, the MEMS pressure system further comprising:

a lead line extending from the first movable electrode directly over a portion of the second fixed electrode.