Door for closing a chamber opening in a chamber wall of a vacuum chamber
First Claim
1. A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space in which the vacuum chamber is located, comprisinga door housing arranged in the surrounding space,a closure member which is arranged in the surrounding space and is adjustable over an adjustment path from an open position for opening up the chamber opening into a closed position for closing the chamber opening,and a rod which has a longitudinal axis and to which the closure member is connected, wherein the closure member is adjusted over the adjustment path by a first movement of the rod and a subsequent second movement of the rod, and the first movement of the rod, by which the closure member is adjusted from the open position into an intermediate position, is a displacement of the rod in a direction of the longitudinal axis, and the subsequent second movement of the rod, by which the closure member is adjusted from the intermediate position into the closed position, is at least one of a displacement of the rod in a direction at an angle to the longitudinal axis or a pivoting of the rod about a pivot axis which is at a right angle to the longitudinal axis, the rod is mounted movably over the first movement and over the second movement in relation to the door housing by bearing elements, said bearing elements, by which the rod is mounted movably over the first movement and over the second movement in relation to the door housing, are arranged in an interior space of the door housing, and the rod is guided out of said interior space into the surrounding space in a sealed manner,wherein said interior space is sealed in relation to the surrounding space and said interior space is evacuated via a passage passing through a housing wall of the door housing.
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Accused Products
Abstract
A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space, in which the vacuum chamber is located, includes a door housing arranged, a closing member arranged in the surrounding space, and a rod, to which the closing member is connected. A first movement of the rod, through which the closing member is displaced from an open position into an intermediate position, occurs as a displacement of the rod in a longitudinal axis direction, and a second movement of the rod subsequent thereto is a displacement at an angle to the longitudinal axis or a pivoting about a pivot axis which is perpendicular to the longitudinal axis from the intermediate position into a closed position. The rod is moveably mounted via the bearing elements, that are arranged in an inner space of the door housing that is sealed with respect to the surrounding space or is connected to the surrounding space via a passage, with a filter, extending through a housing wall of the door housing. The rod is guided out of the inner space in a sealed manner.
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Citations
9 Claims
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1. A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space in which the vacuum chamber is located, comprising
a door housing arranged in the surrounding space, a closure member which is arranged in the surrounding space and is adjustable over an adjustment path from an open position for opening up the chamber opening into a closed position for closing the chamber opening, and a rod which has a longitudinal axis and to which the closure member is connected, wherein the closure member is adjusted over the adjustment path by a first movement of the rod and a subsequent second movement of the rod, and the first movement of the rod, by which the closure member is adjusted from the open position into an intermediate position, is a displacement of the rod in a direction of the longitudinal axis, and the subsequent second movement of the rod, by which the closure member is adjusted from the intermediate position into the closed position, is at least one of a displacement of the rod in a direction at an angle to the longitudinal axis or a pivoting of the rod about a pivot axis which is at a right angle to the longitudinal axis, the rod is mounted movably over the first movement and over the second movement in relation to the door housing by bearing elements, said bearing elements, by which the rod is mounted movably over the first movement and over the second movement in relation to the door housing, are arranged in an interior space of the door housing, and the rod is guided out of said interior space into the surrounding space in a sealed manner, wherein said interior space is sealed in relation to the surrounding space and said interior space is evacuated via a passage passing through a housing wall of the door housing.
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6. A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space in which the vacuum chamber is located, comprising
a door housing arranged in the surrounding space, a closure member which is arranged in the surrounding space and is adjustable over an adjustment path from an open position for opening up the chamber opening into a closed position for closing the chamber opening, and a rod which has a longitudinal axis and to which the closure member is connected, wherein the closure member is adjusted over the adjustment path by a first movement of the rod and a subsequent second movement of the rod, and the first movement of the rod, by which the closure member is adjusted from the open position into an intermediate position, is a displacement of the rod in a direction of the longitudinal axis, and the subsequent second movement of the rod, by which the closure member is adjusted from the intermediate position into the closed position, is at least one of a displacement of the rod in a direction at an angle to the longitudinal axis or a pivoting of the rod about a pivot axis which is at a right angle to the longitudinal axis, the rod is mounted movably over the first movement and over the second movement in relation to the door housing by bearing elements, said bearing elements, by which the rod is mounted movably over the first movement and over the second movement in relation to the door housing, are arranged in an interior space of the door housing, and the rod is guided out of said interior space into the surrounding space in a sealed manner, wherein said interior space is connected to the surrounding space only via a passage which passes through a housing wall of the door housing and in which a particle filter is arranged and said interior space is otherwise sealed from the surrounding space.
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7. A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space in which the vacuum chamber is located, comprising
a door housing arranged in the surrounding space, a closure member which is arranged in the surrounding space and is adjustable over an adjustment path from an open position for opening up the chamber opening into a closed position for closing the chamber opening, and a rod which has a longitudinal axis and to which the closure member is connected, wherein the closure member is adjusted over the adjustment path by a first movement of the rod and a subsequent second movement of the rod, and the first movement of the rod, by which the closure member is adjusted from the open position into an intermediate position, is a displacement of the rod in a direction of the longitudinal axis, and the subsequent second movement of the rod, by which the closure member is adjusted from the intermediate position into the closed position, is at least one of a displacement of the rod in a direction at an angle to the longitudinal axis or a pivoting of the rod about a pivot axis which is at a right angle to the longitudinal axis, the rod is mounted movably over the first movement and over the second movement in relation to the door housing by bearing elements, said bearing elements, by which the rod is mounted movably over the first movement and over the second movement in relation to the door housing, are arranged in an interior space of the door housing, and the rod is guided out of said interior space into the surrounding space in a sealed manner, wherein said interior space is sealed in relation to the surrounding space and said interior space is connected via a passage passing through a housing wall of the door housing to an exterior space which is separate from the surrounding space in which the door housing is arranged.
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8. A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space in which the vacuum chamber is located, comprising
a door housing arranged in the surrounding space, a closure member which is arranged in the surrounding space and is adjustable over an adjustment path from an open position for opening up the chamber opening into a closed position for closing the chamber opening, and a rod which has a longitudinal axis and to which the closure member is connected, wherein the closure member is adjusted over the adjustment path by a first movement of the rod and a subsequent second movement of the rod, and the first movement of the rod, by which the closure member is adjusted from the open position into an intermediate position, is a displacement of the rod in a direction of the longitudinal axis, and the subsequent second movement of the rod, by which the closure member is adjusted from the intermediate position into the closed position, is at least one of a displacement of the rod in a direction at an angle to the longitudinal axis or a pivoting of the rod about a pivot axis which is at a right angle to the longitudinal axis, the rod is mounted movably over the first movement and over the second movement in relation to the door housing by bearing elements, said bearing elements, by which the rod is mounted movably over the first movement and over the second movement in relation to the door housing, are arranged in an interior space of the door housing, and the rod is guided out of said interior space into the surrounding space in a sealed manner, wherein said interior space is sealed in relation to the surrounding space and in order to compensate changes of a volume of said interior space in the process of opening and closing the door, an expansion vessel with an inner expansion space, a volume of which is changeable, is provided, wherein the expansion vessel is arranged in said interior space, which is completely closed, or is arranged in the surrounding space, in which the door housing is located, and is connected to said interior space via a passage passing through a housing wall of the door housing.
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9. A door for closing a chamber opening in a chamber wall of a vacuum chamber in relation to a surrounding space in which the vacuum chamber is located, comprising
a door housing arranged in the surrounding space, a closure member which is arranged in the surrounding space and is adjustable over an adjustment path from an open position for opening up the chamber opening into a closed position for closing the chamber opening, and a rod which has a longitudinal axis and to which the closure member is connected, wherein the closure member is adjusted over the adjustment path by a first movement of the rod and a subsequent second movement of the rod, and the first movement of the rod, by which the closure member is adjusted from the open position into an intermediate position, is a displacement of the rod in a direction of the longitudinal axis, and the subsequent second movement of the rod, by which the closure member is adjusted from the intermediate position into the closed position, is at least one of a displacement of the rod in a direction at an angle to the longitudinal axis or a pivoting of the rod about a pivot axis which is at a right angle to the longitudinal axis, the rod is mounted movably over the first movement and over the second movement in relation to the door housing by bearing elements, said bearing elements, by which the rod is mounted movably over the first movement and over the second movement in relation to the door housing, are arranged in an interior space of the door housing, and the rod is guided out of said interior space into the surrounding space in a sealed manner, wherein said interior space is sealed in relation to the surrounding space or is connected to the surrounding space via a passage which passes through a housing wall of the door housing and in which a particle filter is arranged, and wherein in a region in which the door housing is fastenable to the chamber wall via fastening screws, the door housing has elevations for abutment against the chamber wall and, in a region located further away from the fastening screws than the elevations, the door housing is recessed in relation to the elevations in order to form a gap between the door housing and the chamber wall.
Specification