Surface-enhanced raman scattering unit, and method for using same

• US 10,184,895 B2
• Filed: 04/27/2017
• Issued: 01/22/2019
• Est. Priority Date: 08/10/2012
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Shibayama, Katsumi, Ito, Masashi, Yokino, Takafumi, Hirose, Masaki, Yoshida, Anna, Ofuji, Kazuto, Maruyama, Yoshihiro
• Primary Examiner(s): Nur, Abdullahi
• Application Number:
  US15/499,244
• Publication Number:
  US 20170227468A1
• Time in Patent Office: 635 Days
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0205 Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
• CPC Class Codes: G01J 3/12 Generating the spectrum; Monochromators
• CPC Class Codes: G01J 3/44 Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
• CPC Class Codes: G01J 3/4412 Scattering spectrometry particle sizing by light scattering G01N15/0205; optical velocimetry of particles G01P5/20, G01P5/26
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons
• CPC Class Codes: G01N 2201/02 Mechanical
• CPC Class Codes: G01N 2201/0227 Sealable enclosure
• CPC Class Codes: G01N 2201/06113 Coherent sources; lasers

Abstract

A SERS unit comprises a substrate; an optical function part formed on the substrate, for generating surface-enhanced Raman scattering; and a package containing the optical function part in an inert space and configured to irreversibly expose the space.

Claims

1. A surface-enhanced Raman scattering unit comprising:

a handling board;

a substrate arranged on the handling board;

an optical function part constructed by a conductor layer covering a fine structure part formed on the substrate, for generating surface-enhanced Raman scattering;

a surrounding part surrounding the optical function part and arranged on the substrate;

wherein the substrate is located between the handling board and the surrounding part;

the surrounding part defines a space in which the optical function part is arranged; and

when seen in the thickness direction of the substrate, the space is included by the substrate, and

the space being an enclosed space.

2. A surface-enhanced Raman scattering unit according to claim 1,

wherein the surrounding part is arranged on the substrate with the conductor layer interposed therebetween.

3. A surface-enhanced Raman scattering unit according to claim 1, further comprising a package containing the optical function part;

wherein a part opposing the optical function part in the package is deflected to the side of the optical function part.

4. A surface-enhanced Raman scattering unit comprising:

a support member;

a substrate arranged on the support member;

an optical function part constructed by a metal forming provided on a fine structure part on the substrate, for generating surface-enhanced Raman scattering; and

a package member arranged on the support member or on the substrate;

wherein the package member defines a space in which the optical function part is arranged,

the space being an enclosed space.

5. A surface-enhanced Raman scattering unit according to claim 4,

wherein the package member is provided with a holding part.

6. A surface-enhanced Raman scattering unit according to claim 4,

wherein the package member is provided with a start point for exposing the space.

7. A surface-enhanced Raman scattering unit according to claim 4,

wherein the package member is arranged on the substrate with a metal layer interposed therebetween.

8. A surface-enhanced Raman scattering unit according to claim 4,

wherein a part opposing the optical function part in the package member is deflected to the side of the optical function part.

9. A surface-enhanced Raman scattering unit according to claim 4,

wherein when seen in the thickness direction of the substrate, the space is included by the substrate.

10. A surface-enhanced Raman scattering unit according to claim 4,

wherein the package member has a first inner surface opposing the optical function part and a second inner surface opposing a side surface of the substrate;

and

the distance between the optical function part and the first inner surface of the package member is larger than the distance between the side surface of the substrate and the second inner surface of the package member.