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Single image detection

  • US 10,186,026 B2
  • Filed: 11/16/2016
  • Issued: 01/22/2019
  • Est. Priority Date: 11/17/2015
  • Status: Active Grant
First Claim
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1. A system configured to detect defects on a specimen, comprising:

  • an imaging subsystem configured for generating images of a specimen, wherein the imaging subsystem comprises at least an energy source configured to direct energy to the specimen and at least a detector configured to detect energy from the specimen;

    one or more computer subsystems coupled to the imaging subsystem, wherein the one or more computer subsystems are configured for acquiring a single test image for a portion of the specimen generated by the imaging subsystem; and

    one or more components executed by the one or more computer subsystems, wherein the one or more components comprise;

    a generative model, wherein the generative model comprises a non-linear network configured for mapping blocks of pixels of an input feature map volume into labels, and wherein the labels are indicative of one or more defect-related characteristics of the blocks;

    wherein the one or more computer subsystems are further configured for inputting the single test image into the generative model;

    wherein the generative model is configured for;

    separating the single test image into multiple blocks of pixels;

    for at least one of the multiple blocks of pixels, determining a feature of the at least one of the multiple blocks based on only the pixels in the at least one of the multiple blocks; and

    selecting one of the labels for the at least one of the multiple blocks based on the determined feature and the mapping of the blocks of the pixels of the input feature map volume into the labels; and

    wherein the one or more computer subsystems are further configured for detecting defects in the portion of the specimen based on the selected label for the at least one of the multiple blocks.

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