Method for manufacturing semiconductor device
First Claim
1. A method for manufacturing a semiconductor device, comprising the steps of:
- forming a gate electrode over a substrate;
forming a gate insulating film over the substrate and the gate electrode;
forming an oxide semiconductor layer over the gate insulating film by sputtering;
performing a first heat treatment on the oxide semiconductor layer to reduce a hydrogen concentration of the oxide semiconductor layer;
supplying oxygen into the oxide semiconductor layer during cooling after performing the first heat treatment and before forming a source electrode and a drain electrode over the oxide semiconductor layer;
forming an insulating film over the oxide semiconductor layer, the source electrode, and the drain electrode; and
performing a second heat treatment after forming the insulating film.
0 Assignments
0 Petitions
Accused Products
Abstract
An object is to provide a semiconductor device having stable electric characteristics in which an oxide semiconductor is used. An oxide semiconductor layer is subjected to heat treatment for dehydration or dehydrogenation treatment in a nitrogen gas or an inert gas atmosphere such as a rare gas (e.g., argon or helium) or under reduced pressure and to a cooling step for treatment for supplying oxygen in an atmosphere of oxygen, an atmosphere of oxygen and nitrogen, or the air (having a dew point of preferably lower than or equal to −40° C., still preferably lower than or equal to −50° C.) atmosphere. The oxide semiconductor layer is thus highly purified, whereby an i-type oxide semiconductor layer is formed. A semiconductor device including a thin film transistor having the oxide semiconductor layer is manufactured.
-
Citations
18 Claims
-
1. A method for manufacturing a semiconductor device, comprising the steps of:
-
forming a gate electrode over a substrate; forming a gate insulating film over the substrate and the gate electrode; forming an oxide semiconductor layer over the gate insulating film by sputtering; performing a first heat treatment on the oxide semiconductor layer to reduce a hydrogen concentration of the oxide semiconductor layer; supplying oxygen into the oxide semiconductor layer during cooling after performing the first heat treatment and before forming a source electrode and a drain electrode over the oxide semiconductor layer; forming an insulating film over the oxide semiconductor layer, the source electrode, and the drain electrode; and performing a second heat treatment after forming the insulating film. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A method for manufacturing a semiconductor device, comprising the steps of:
-
forming a gate electrode over a substrate; forming a gate insulating film over the substrate and the gate electrode; forming an oxide semiconductor layer over the gate insulating film by sputtering; performing a first heat treatment on the oxide semiconductor layer to reduce a hydrogen concentration of the oxide semiconductor layer; supplying oxygen into the oxide semiconductor layer by performing a cooling treatment after performing the first heat treatment; forming a source electrode and a drain electrode over the oxide semiconductor layer; forming an insulating film over the oxide semiconductor laver, the source electrode, and the drain electrode; and performing a second heat treatment after forming the insulating film. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
-
Specification