Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
First Claim
Patent Images
1. A strain sensing element provided on a deformable substrate, comprising:
- a first magnetic layer;
a second magnetic layer including Fe1-yBy (0<
y≤
0.3); and
an intermediate layer provided between the first magnetic layer and the second magnetic layer,wherein a first part of the Fe1-yBy (0<
y≤
0.3) is amorphous and a second part of the Fe1-yBy (0<
y≤
0.3) is not amorphous.
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Abstract
The disclosure relates to a strain sensing element provided on a deformable substrate. The strain sensing element includes: a first magnetic layer; a second magnetic layer; and an intermediate layer. The second magnetic layer includes Fe1-yBy (0<y≤0.3). Magnetization of the second magnetic layer changes according to deformation of the substrate. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.
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Citations
19 Claims
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1. A strain sensing element provided on a deformable substrate, comprising:
-
a first magnetic layer; a second magnetic layer including Fe1-yBy (0<
y≤
0.3); andan intermediate layer provided between the first magnetic layer and the second magnetic layer, wherein a first part of the Fe1-yBy (0<
y≤
0.3) is amorphous and a second part of the Fe1-yBy (0<
y≤
0.3) is not amorphous. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A strain sensing element provided on a deformable substrate, comprising:
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a first magnetic layer; a second magnetic layer including (FeaX1-a)1-yBy (X being Co or Ni, 0.8≤
a<
1, and 0<
y≤
0.3); andan intermediate layer provided between the first magnetic layer and the second magnetic layer, wherein a first part of the (FeaX1-a)1-yBy (X being Co or Ni, 0.8≤
a<
1, and 0<
y≤
0.3) is amorphous and a second part of the (FeaX1-a)1-yBy is not amorphous. - View Dependent Claims (15, 16, 17, 18)
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19. A strain sensing element provided on a deformable substrate, comprising:
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a first magnetic layer; a second magnetic layer including (FeaNi1-a)1-yBy (0.8≤
a<
1, and 0<
y≤
0.3); andan intermediate layer provided between the first magnetic layer and the second magnetic layer, wherein a first part of the (FeaNi1-a)1-yBy (0.8≤
a<
1, and 0<
y≤
0.3) is amorphous and a second part of the (FeaNi1-a)1-yBy is not amorphous.
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Specification