Sensor with movable parts and biasing
First Claim
Patent Images
1. An apparatus, comprising:
- a sensor comprising a first electrode, a movable part, and a second electrode,a first capacitance being defined between the first electrode and the movable part,a second capacitance being defined between the movable part and the second electrode,the first electrode being directly coupled to an amplifier, andthe second electrode being directly coupled to the amplifier;
a first switch coupling a first voltage source with;
the movable part, orthe first electrode and the second electrode;
a second switch coupling a second voltage source with;
the movable part, orthe first electrode and the second electrode; and
a clock, coupled to the first switch and the second switch, to alternately close the first switch and the second switch.
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Abstract
Methods and apparatuses are provided wherein a sensor which comprises at least two electrodes and a movable part is alternately biased with at least two different voltages.
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Citations
20 Claims
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1. An apparatus, comprising:
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a sensor comprising a first electrode, a movable part, and a second electrode, a first capacitance being defined between the first electrode and the movable part, a second capacitance being defined between the movable part and the second electrode, the first electrode being directly coupled to an amplifier, and the second electrode being directly coupled to the amplifier; a first switch coupling a first voltage source with; the movable part, or the first electrode and the second electrode; a second switch coupling a second voltage source with; the movable part, or the first electrode and the second electrode; and a clock, coupled to the first switch and the second switch, to alternately close the first switch and the second switch. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method, comprising:
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receiving, by an apparatus, a first voltage from a first voltage source, the apparatus comprising a sensor that comprises a first electrode, a movable part, and a second electrode, a first capacitance being defined between the first electrode and the movable part, a second capacitance being defined between the movable part and the second electrode, the first electrode being directly coupled to an amplifier, and the second electrode being directly coupled to the amplifier; receiving, by the apparatus, a second voltage from a second voltage source; and alternately closing, by the apparatus and based on a clock, a first switch and a second switch, the first voltage source being coupled, via the first switch, with; the movable part, or the first electrode and the second electrode, and the second voltage source being coupled, via the second switch, with; the movable part, or the first electrode and the second electrode. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. An apparatus, comprising:
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a first electrode; a movable part; and a second electrode, a first capacitance being defined between the first electrode and the movable part, a second capacitance being defined between the movable part and the second electrode, the first electrode being directly coupled to an amplifier, the second electrode being directly coupled to the amplifier, the movable part being alternately coupled, based on a clock and via a first switch and a second switch, to a first voltage source and a second voltage source, the movable part being coupled the first voltage source when the first switch is closed, and the movable part being coupled to the second voltage source when the second switch is closed. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification