Vacuum gate valve
First Claim
1. A vacuum gate valve including a casing having an opening, and a valve plate that swings in the casing to open/close the opening, the vacuum gate valve comprising:
- a position adjusting assembly arranged circumferentially about the opening and housed inside the casing at a circumferential gap therefrom, the position adjusting assembly for bringing the valve plate into close contact with the casing when the valve plate is in a position where it entirely closes the casing opening;
whereinthe position adjusting assembly includesa rise/lower armature arranged circumferentially about the opening and movable upward and downward inside the casing along an O-ring-free, grease-free portion of the circumferential gap, the rise/lower armature for coming into close contact with the valve plate in electromagnetically actuated downward movement and separating from the valve plate in electromagnetically actuated upward movement, andan electromagnetic raising/lowering actuator arranged circumferentially about the opening, and fixed to and sealed airtight against the casing, the raising/lowering actuator for electromagnetically raising/lowering the rise/lower armature inside the casing without friction resistance being generated between the rise/lower armature and the casing.
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Accused Products
Abstract
A vacuum gate valve includes a casing having an opening, and a valve plate that swings in the casing to open/close the opening. The vacuum gate valve further includes a position adjuster for bringing the valve plate into close contact with the casing when the valve plate is in a position where it entirely closes the casing opening. The position adjuster includes a rise/lower element for moving up and down inside the casing to come into contact with the valve plate and adjust the valve plate'"'"'s position, and a raising/lowering unit for raising/lowering the rise/lower element inside the casing without friction resistance being generated between the rise/lower element and the casing.
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Citations
12 Claims
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1. A vacuum gate valve including a casing having an opening, and a valve plate that swings in the casing to open/close the opening, the vacuum gate valve comprising:
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a position adjusting assembly arranged circumferentially about the opening and housed inside the casing at a circumferential gap therefrom, the position adjusting assembly for bringing the valve plate into close contact with the casing when the valve plate is in a position where it entirely closes the casing opening;
whereinthe position adjusting assembly includes a rise/lower armature arranged circumferentially about the opening and movable upward and downward inside the casing along an O-ring-free, grease-free portion of the circumferential gap, the rise/lower armature for coming into close contact with the valve plate in electromagnetically actuated downward movement and separating from the valve plate in electromagnetically actuated upward movement, and an electromagnetic raising/lowering actuator arranged circumferentially about the opening, and fixed to and sealed airtight against the casing, the raising/lowering actuator for electromagnetically raising/lowering the rise/lower armature inside the casing without friction resistance being generated between the rise/lower armature and the casing. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A vacuum gate valve including a casing having an opening, and a valve plate that swings in the casing to open/close the opening, the vacuum gate valve comprising:
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a position adjusting assembly arranged circumferentially about the opening and housed inside the casing, the position adjusting assembly for bringing the valve plate into close contact with the casing when the valve plate is in a position where it entirely closes the casing opening;
whereinthe position adjusting assembly includes a rise/lower armature arranged circumferentially about the opening and movable upward and downward inside the casing, the rise/lower armature for coming into close contact with the valve plate in electromagnetically actuated downward movement and separating from the valve plate in electromagnetically actuated upward movement, and an electromagnetic raising/lowering actuator arranged circumferentially about the opening, the raising/lowering actuator for raising/lowering the rise/lower armature inside the casing without friction resistance being generated between the rise/lower armature and the casing, wherein the raising/lowering actuator includes bellows that are in a non-contact state with the casing, and the bellows guide rising/lowering of the rise/lower armature in the rise/lower armature'"'"'s rising/lowering. - View Dependent Claims (10, 11, 12)
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Specification