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Combined magnetometer accelerometer MEMS devices and methods

  • US 10,197,590 B2
  • Filed: 11/17/2015
  • Issued: 02/05/2019
  • Est. Priority Date: 11/17/2014
  • Status: Active Grant
First Claim
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1. A microelectromechanical (MEMS) device comprising:

  • a structural member;

    a plurality of supports suspending the structural member above a bottom electrode; and

    a plurality of top electrical contacts, each top electrical contact associated with a support;

    whereinthe structural member acts as a current carrying element for a magnetometer operable in at least two dimensions; and

    the structural member acts as a proof mass for an accelerometer operable in at least two dimensions and supporting concurrent use as a magnetometer and an accelerometer with the same structural MEMS element.

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