Physical quantity sensor, electronic device, and moving object
First Claim
1. A physical quantity sensor comprising:
- a substrate;
a movable body including a movable electrode; and
a support configured to support the movable body to be displaced around a first shaft;
wherein the movable body is divided into a first portion and a second portion by the first shaft, the first portion and the second portion being arranged along a direction orthogonal to the first shaft,in a plan view, a distance from the first shaft to an opposing end of the first portion is larger than a distance from the first shaft to an opposing end of the second portion in the direction orthogonal to the first shaft,a first fixed electrode and a second fixed electrode are disposed on the substrate, the first fixed electrode being opposed to the first portion and the second fixed electrode being opposed to the second portion,a first electrode is electrically connected to the movable body and a second electrode is electrically connected to the movable body, the first electrode and the second electrode being disposed on the substrate,the first electrode is disposed in a first region of the substrate and a second region of the substrate in the plan view, the first region s arranged between the first fixed electrode and the second fixed electrode in the plan view, and the second region overlaps the movable body and includes an area between the opposing end of the first portion and the first fixed electrode in the plan view, andthe second electrode is disposed in a third region of the substrate different from the first region and the second region, the third region not overlapping the movable body in the plan view, and the second electrode is provided on a side of the second fixed electrode opposite the support and separated from the second fixed electrode.
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Accused Products
Abstract
A physical quantity sensor according to the embodiment includes: a substrate; a movable body including a movable electrode portion; and a support which supports the movable body around a first shaft to be displaced, in which, when the movable body is divided into a first portion and a second portion with the first shaft as a boundary, the physical quantity sensor includes a first fixed electrode portion which is disposed on the substrate to oppose the first portion, and a second fixed electrode portion which is disposed on the substrate to oppose the second portion, and a guard portion which suppresses an electrostatic force generated between the movable body and the substrate is provided in an inter-electrode area between the first fixed electrode portion and the second fixed electrode portion, on the substrate.
7 Citations
11 Claims
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1. A physical quantity sensor comprising:
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a substrate; a movable body including a movable electrode; and a support configured to support the movable body to be displaced around a first shaft; wherein the movable body is divided into a first portion and a second portion by the first shaft, the first portion and the second portion being arranged along a direction orthogonal to the first shaft, in a plan view, a distance from the first shaft to an opposing end of the first portion is larger than a distance from the first shaft to an opposing end of the second portion in the direction orthogonal to the first shaft, a first fixed electrode and a second fixed electrode are disposed on the substrate, the first fixed electrode being opposed to the first portion and the second fixed electrode being opposed to the second portion, a first electrode is electrically connected to the movable body and a second electrode is electrically connected to the movable body, the first electrode and the second electrode being disposed on the substrate, the first electrode is disposed in a first region of the substrate and a second region of the substrate in the plan view, the first region s arranged between the first fixed electrode and the second fixed electrode in the plan view, and the second region overlaps the movable body and includes an area between the opposing end of the first portion and the first fixed electrode in the plan view, and the second electrode is disposed in a third region of the substrate different from the first region and the second region, the third region not overlapping the movable body in the plan view, and the second electrode is provided on a side of the second fixed electrode opposite the support and separated from the second fixed electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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Specification