Optical coupler
First Claim
1. An optical coupler, comprising:
- a semiconductor substrate;
a first cladding layer arranged over the semiconductor substrate and having a relatively lower refractive index; and
a plurality of waveguide assemblies stacked vertically over the first cladding layer, the plurality of waveguide assemblies comprising;
a lower waveguide assembly arranged over the first cladding layer and comprising;
a lower cladding layer having a relatively lower refractive index; and
a tapered lower waveguide being at least partly encapsulated in the lower cladding layer and having a relatively higher refractive index;
a first intermediate waveguide assembly comprising;
a first intermediate cladding layer having a relatively lower refractive index; and
two first intermediate waveguides spaced laterally from each other, each of the first intermediate waveguides being at least partly encapsulated in the first intermediate cladding layer and having a relatively higher refractive index; and
an upper waveguide assembly arranged over the first intermediate waveguide assembly, the upper waveguide assembly comprising;
an upper cladding layer having a relatively lower refractive index, the upper cladding layer having a smaller extent vertically than does the first intermediate cladding layer; and
at least two upper waveguides spaced laterally from each other, each of the at least two upper waveguides being at least partly encapsulated in the upper cladding layer and having a relatively higher refractive index.
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Accused Products
Abstract
A semiconductor photonic device includes a substrate, facet(s), and optical coupler(s) associated with the facet(s). Each optical coupler can couple an electromagnetic field incident on the respective facet towards the substrate as the electromagnetic field proceeds into the semiconductor photonic device. In some examples, each coupler has waveguides extending in a longitudinal direction and at least partly encapsulated within corresponding cladding layers. A first waveguide extends farther from the facet in the longitudinal direction than does a second waveguide. The second waveguide is located farther above the silicon substrate than is the first waveguide. The coupler can include a stack of waveguide assemblies. A lower waveguide assembly can include one waveguide. An intermediate or upper waveguide assembly can include multiple waveguides. In some examples, at least one waveguide tapers along its length.
22 Citations
19 Claims
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1. An optical coupler, comprising:
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a semiconductor substrate; a first cladding layer arranged over the semiconductor substrate and having a relatively lower refractive index; and a plurality of waveguide assemblies stacked vertically over the first cladding layer, the plurality of waveguide assemblies comprising; a lower waveguide assembly arranged over the first cladding layer and comprising; a lower cladding layer having a relatively lower refractive index; and a tapered lower waveguide being at least partly encapsulated in the lower cladding layer and having a relatively higher refractive index; a first intermediate waveguide assembly comprising; a first intermediate cladding layer having a relatively lower refractive index; and two first intermediate waveguides spaced laterally from each other, each of the first intermediate waveguides being at least partly encapsulated in the first intermediate cladding layer and having a relatively higher refractive index; and an upper waveguide assembly arranged over the first intermediate waveguide assembly, the upper waveguide assembly comprising; an upper cladding layer having a relatively lower refractive index, the upper cladding layer having a smaller extent vertically than does the first intermediate cladding layer; and at least two upper waveguides spaced laterally from each other, each of the at least two upper waveguides being at least partly encapsulated in the upper cladding layer and having a relatively higher refractive index. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. An optical coupler, comprising:
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a semiconductor substrate; a buried oxide layer disposed above the semiconductor substrate; and a plurality of waveguide assemblies stacked in a vertical direction above the first cladding layer, the plurality of waveguide assemblies comprising; a lower waveguide assembly comprising; a lower cladding layer; and a tapered lower waveguide at least partly encapsulated in the lower cladding layer and having a higher refractive index than the lower cladding layer and the first cladding layer; a first intermediate waveguide assembly comprising; a first intermediate cladding layer; and two first intermediate waveguides at least partly encapsulated in the first intermediate cladding layer, and having a higher refractive index than the intermediate cladding layer; an upper waveguide assembly comprising; an upper cladding layer having a narrower vertical thickness than the first intermediate cladding layer; and four upper waveguides spaced apart from each other in the lateral direction and at least partly encapsulated in the upper cladding layer, the upper waveguides having a higher refractive index than the upper cladding layer; and a second intermediate waveguide assembly disposed between the first intermediate waveguide assembly and the upper waveguide assembly, the second intermediate waveguide assembly comprising; a second intermediate cladding layer having a narrower vertical thickness than the first intermediate cladding layer; and four second intermediate waveguides spaced apart from each other in the lateral direction, at least partly encapsulated in the second intermediate cladding layer, and aligned with the four upper waveguides in the vertical direction, the second intermediate waveguides having a higher refractive index than the second intermediate cladding layer.
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Specification