Differential pressure sensor incorporating common mode error compensation

• US 10,203,255 B2
• Filed: 08/25/2016
• Issued: 02/12/2019
• Est. Priority Date: 08/25/2016
• Status: Active Grant

• Current Assignee: Measurement Specialties Incorporated (TE Connectivity Limited)
• Original Assignee: Measurement Specialties Incorporated (TE Connectivity Limited)
• Inventors: Wagner, David E., Hoffman, James H., Kachenko, Natasha V.
• Primary Examiner(s): Ha, Nguyen Q.
• Application Number:
  US15/247,532
• Publication Number:
  US 20180058963A1
• Time in Patent Office: 901 Days
• CPC Class Codes: G01L 13/025 using diaphragms
• CPC Class Codes: G01L 15/00 Devices or apparatus for measuring two or more fluid pressure values simultaneously
• CPC Class Codes: G01L 19/14 Housings G01L19/0007, G01L19/0084, G01L19/0092, G01L19/04, G01L19/06 take precedence
• CPC Class Codes: G01L 27/002 Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
• CPC Class Codes: G01L 9/0054 integral with a semiconducting diaphragm

Abstract

A differential pressure sensor may provide a common mode corrected differential pressure reading. The differential pressure sensor may include two pressure sensing diaphragms. The pressure sensor may be configured so that the first diaphragm measures the differential pressure between two sections of a fluid. The pressure sensor may also be configured so that the second diaphragm measures the common mode error experienced by the die at the time the differential pressure is read by the first diaphragm. Electrical connectors may be configured so that the differential pressure outputs a common mode error corrected differential pressure reading based on the readings of the first and second diaphragm.

Claims

1. A differential pressure sensor comprising:

a sensor housing including a base plate having a hole therein, wherein a first side of the base plate is configured to be in fluid communication with a first fluid at a first pressure and a second side of the base plate is configured to be in fluid communication with a second fluid at a second pressure;

a first pressure sensing die assembly attached to the first side of the base plate in a first chamber of the sensor housing, said first pressure sensing die assembly including;

(1) a first pressure sensing die including a first diaphragm having an upper side configured to be in fluid communication with said first fluid and a lower side configured to be in fluid communication with said hole in said base plate and said second fluid; and

(2) at least one pressure sensitive electrical element, formed in or on the first diaphragm, configured to exhibit a varying resistance responsive to deflection of said first diaphragm representative of a differential pressure between the first pressure and the second pressure;

a second pressure sensing die assembly attached to the first side of the base plate in the first chamber of the sensor housing, said second pressure sensing die assembly including;

(1) a second pressure sensing die including a second diaphragm having an upper side configured to be in fluid communication with said first fluid and a lower side configured to be in fluid communication with said first fluid; and

(2) at least one pressure sensitive electrical element, formed in or on the second diaphragm, configured to exhibit a varying resistance responsive to deflection of said second diaphragm representative of a common mode error corresponding to the second pressure sensing die assembly;

one or more electrical conductors electrically connected to one or both of the at least one pressure sensitive electrical element of the first diaphragm and the at least one pressure sensitive electrical element of the second diaphragm.

2. The differential pressure sensor of claim 1, wherein the first pressure sensing die assembly further comprises a first support structure between said first pressure sensing die and said first side of said base plate, said first support structure including a first aperture configured to be in fluid communication with the hole in the base plate, the first diaphragm lower side, and the second fluid;

and wherein the second pressure sensing die assembly further comprises a second support structure between said second pressure sensing die and said first side of said base plate, said second support structure including a second aperture configured to be in fluid communication with the second diaphragm lower side and the first fluid.

3. The differential pressure sensor of claim 2, wherein the first support structure is attached to the base plate with a die attach material configured to place the first aperture in fluid communication with the hole in the base plate and the second fluid but not the first fluid, and wherein the second support structure is attached to the base plate with a die attach material configured to form a vent channel in the die attach material which places the second aperture in fluid communication with the first fluid but not the second fluid.

4. The differential pressure sensor of claim 3, wherein the first support structure and the second support structure are made from one of silicon and glass.

5. The differential pressure sensor of claim 1, wherein the one or more electrical conductors are connected to a positive output terminal of said at least one pressure sensitive electrical element of the first diaphragm and a positive output terminal of said at least one pressure sensitive electrical element of the second diaphragm, and wherein the one or more electrical conductors are configured to subtract a reading from the positive output terminal of said at least one pressure sensitive electrical element of the second diaphragm from a reading from the positive output terminal of said at least one pressure sensitive electrical element of the first diaphragm to thereby output the common mode corrected differential pressure.

6. The differential pressure sensor of claim 1, wherein a negative output terminal of said at least one pressure sensitive electrical element of the first diaphragm is connected to a positive output terminal of said at least one pressure sensitive electrical element of the second diaphragm, thereby providing at a positive output terminal of said at least one pressure sensitive electrical element of the first diaphragm an electrical output representative of the common mode corrected differential pressure, wherein the electrical connector is connected to the positive output terminal of the at least one pressure sensitive electrical element of the first diaphragm.

7. The differential pressure sensor of claim 1, wherein each of said at least one pressure sensitive electrical element of the first diaphragm and said at least one pressure sensitive electrical element of the second diaphragm comprises a bridge circuit.

8. A differential pressure sensor comprising:

a sensor housing including a base plate having a hole therein, wherein a first side of the base plate is configured to be in fluid communication with a first fluid at a first pressure and a second side of the base plate is configured to be in fluid communication with a second fluid at a second pressure;

a pressure sensing die assembly attached to said first side of said base plate, said first pressure sensing die assembly including;

a support structure including a first aperture and a second aperture defined therethrough, wherein the support structure is attached to the first side of the base plate and is configured to place the first aperture in fluid communication with the hole in the base plate and the second fluid;

a pressure sensing die attached to the support structure, said pressure sensing die comprising;

a first chamber defining a first diaphragm having a first diaphragm upper side configured to be in fluid communication with said first fluid and a first diaphragm lower side configured to be in fluid communication with said first aperture and said second fluid;

at least one pressure sensitive electrical element formed in or on the first diaphragm, the at least pressure sensitive electrical element exhibiting a varying resistance responsive to deflection of said first diaphragm representative of a differential pressure between the first pressure and the second pressure;

a second chamber defining a second diaphragm including a second diaphragm upper side configured to be in fluid communication with said first fluid and a second diaphragm lower side configured to be in fluid communication with said second aperture and said first fluid;

at least one pressure sensitive electrical element formed in or on the second diaphragm, the at least one pressure sensitive electrical element exhibiting a varying resistance responsive to deflection of said second diaphragm representative of a common mode error corresponding to the pressure sensing die assembly;

one or more electrical conductors electrically connected to one or both of the at least one pressure sensitive electrical element bonded to the first diaphragm and the at least one pressure sensitive electrical element bonded to the second diaphragm, said one or more electrical conductors configured to output a common mode error corrected differential pressure output.

9. The differential pressure sensor of claim 8, wherein the pressure sensing die includes a vent channel which is configured to permit fluid communication between the second chamber and the first fluid.

10. The differential pressure sensor of claim 8, wherein the support structure is attached to the base plate with a die attach material such that the first chamber is in fluid communication with the second fluid but not the first fluid, and such that a vent channel is formed in the die attach material which places the second chamber in fluid communication with the second aperture and the first fluid but not the second fluid.

11. The differential pressure sensor of claim 8, wherein the support structure is made from one of silicon and glass.

12. The differential pressure sensor of claim 8, wherein a negative output terminal of said at least one pressure sensitive electrical element of the first diaphragm is connected to a positive output terminal of said at least one pressure sensitive electrical element of the second diaphragm, thereby providing at a positive output terminal of said at least one pressure sensitive electrical element of the first diaphragm an electrical output representative of the common mode corrected differential pressure, wherein the electrical connector is connected to the positive output terminal of the at least one pressure sensitive electrical element of the first diaphragm.

13. The differential pressure sensor of claim 8, wherein a negative output terminal of said at least one pressure sensitive electrical element of the first diaphragm is connected to the positive output terminal of said at least one pressure sensitive electrical element of the second diaphragm by one of a bonding wire and a conductive trace on or in the pressure sensing die.

14. The differential pressure sensor of claim 8, wherein each of said at least one pressure sensitive electrical element of the first diaphragm and said at least one pressure sensitive electrical element of the second diaphragm comprises a bridge circuit.

15. A differential pressure sensor comprising:

a sensor housing including a base plate having a hole therein, wherein a first side of the base plate is configured to be in fluid communication with a first fluid at a first pressure and a second side of the base plate is configured to be in fluid communication with a second fluid at a second pressure;

at least one pressure sensing die assembly attached to said first side of said base plate, said at least one pressure sensing die assembly including;

at least one support structure including a first aperture and a second aperture defined therethrough, wherein the at least one support structure is attached to the first side of the base plate and is configured to place the first aperture in fluid communication with the hole in the base plate and the second fluid;

at least one pressure sensing die attached to the at least one support structure, said at least one pressure sensing die comprising;

a first chamber defining a first diaphragm having a first diaphragm upper side configured to be in fluid communication with said first fluid and a first diaphragm lower side configured to be in fluid communication with said first aperture and said second fluid;

at least one pressure sensitive electrical element formed in or on the first diaphragm, the at least pressure sensitive electrical element exhibiting a varying resistance responsive to deflection of said first diaphragm representative of a differential pressure between the first pressure and the second pressure;

a second chamber defining a second diaphragm including a second diaphragm upper side configured to be in fluid communication with said first fluid and a second diaphragm lower side configured to be in fluid communication with said second aperture and said first fluid;

at least one pressure sensitive electrical element formed in or on the second diaphragm, the at least one pressure sensitive electrical element exhibiting a varying resistance responsive to deflection of said second diaphragm representative of a common mode error corresponding to the at least one pressure sensing die assembly;

one or more electrical conductors electrically connected to one or both of the at least one pressure sensitive electrical element bonded to the first diaphragm and the at least one pressure sensitive electrical element bonded to the second diaphragm, said one or more electrical conductors configured to output a common mode error corrected differential pressure output.

16. The differential pressure sensor of claim 15, wherein said at least one pressure sensing die assembly comprises a single pressure sensing die assembly, said at least one pressure sensing die comprises a single pressure sensing die, and said at least one support structure comprises a single support structure.

17. The differential pressure sensor of claim 16, wherein the single pressure sensing die includes a vent channel which is configured to permit fluid communication between the second chamber and the first fluid.

18. The differential pressure sensor of claim 16, wherein the single support structure is attached to the base plate with a die attach material such that the first chamber is in fluid communication with the second fluid but not the first fluid, and such that a vent channel is formed in the die attach material which places the second chamber and the second aperture in fluid communication with the first fluid but not the second fluid.

19. The differential pressure sensor of claim 15, wherein said at least one pressure sensing die assembly comprises a first pressure sensing die assembly and a second pressure sensing die assembly, said at least one pressure sensing die comprises a first pressure sensing die and a second pressure sensing die, and said at least one support structure comprises a first support structure and a second support structure, wherein:

said first pressure sensing die assembly comprises the first pressure sensing die attached to the first support structure, wherein the first support structure includes the first aperture defined therethrough and is attached to the base plate such that the first aperture is in fluid communication with the hole in the base plate, wherein the first pressure sensing die includes the first chamber defining the first diaphragm having the first diaphragm upper side configured to be in fluid communication with said first fluid, the first diaphragm lower side configured to be in fluid communication with said first aperture and said second fluid, and the at least one pressure sensitive electrical element formed in or on the first diaphragm; and

said second pressure sensing die assembly comprises the second pressure sensing die attached to the second support structure, wherein the second pressure sensing die includes the second chamber defining the second diaphragm including the second diaphragm upper side configured to be in fluid communication with said first fluid, the second diaphragm lower side configured to be in fluid communication with said second aperture and said first fluid, and the at least one pressure sensitive electrical element formed in or on the second diaphragm.

20. The differential pressure sensor of claim 19, wherein the first support structure is attached to the base plate with a die attach material such that the first chamber and the first aperture are in fluid communication with the second fluid but not the first fluid, and wherein the second support structure is attached to the base plate with a die attach material such that a vent channel is formed in the die attach material which places the second chamber and the second aperture in fluid communication with the first fluid but not the second fluid.