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Microfluidic devices for liquid chromatography-mass spectrometry and microscopic imaging

  • US 10,203,307 B2
  • Filed: 06/03/2015
  • Issued: 02/12/2019
  • Est. Priority Date: 12/11/2012
  • Status: Active Grant
First Claim
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1. An apparatus comprising:

  • a first wafer;

    a second wafer, the first and second wafers comprising silicon wafers and defining a sample input hole, the second wafer defining a first portion of a first channel, the first channel including a first end and a second end, the first end of the first channel proximate to and fluidly coupled to the sample input hole, the first channel configured to contain separation media;

    an emitter, the emitter being disposed between the first wafer and the second wafer, the second end of the first channel proximate to and fluidly coupled to the emitter; and

    a transparent wafer being an optically transparent glass wafer configured to define a second portion of the first channel, the transparent wafer being bonded to a bottom surface of the second wafer, wherein the bond is an anodic silicon-glass bond, and wherein the first wafer, the second wafer, and the transparent wafer are monolithically integrated,the transparent wafer being further configured to be transparent along the second portion of the first channel to provide an imaging window of an entirety of the separation media included in the first channel, wherein the second wafer is disposed between the first wafer and the transparent wafer.

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