Electromagnetic radiation enhancement methods and systems

• US 10,209,526 B2
• Filed: 01/20/2014
• Issued: 02/19/2019
• Est. Priority Date: 01/20/2014
• Status: Active Grant

• Current Assignee: Michael Soskind, Rose Soskind, Yakov Soskind
• Original Assignee: Michael Soskind, Rose Soskind, Yakov Soskind
• Inventors: Soskind, Yakov, Soskind, Michael, Soskind, Rose
• Primary Examiner(s): Beatty, Collin X
• Application Number:
  US14/159,257
• Publication Number:
  US 20150205137A1
• Time in Patent Office: 1,856 Days
• Field of Search: 430 5, 430322, 430394, 430396, 359 1, 359305, 359238, 359350, 359637, 359352, 716 50, 438551, 438553, 438671, 438717, 438736, 438942, 438943, 438945, 438947, 438950
• CPC Class Codes: G02B 27/0927 Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
• CPC Class Codes: G02B 27/0955 Lenses lenses per se G02B3/00
• CPC Class Codes: G02B 27/0983 being curved
• CPC Class Codes: G02B 27/0988 Diaphragms, spatial filters, masks for removing or filtering a part of the beam
• CPC Class Codes: G02B 5/3083 Birefringent or phase retarding elements G02B5/3008, G02B5/3016 take precedence; systems for polarisation control G02B27/286; manufacturing phase modulating patterns by lithographic processes G03F7/001
• CPC Class Codes: G02B 5/3091 for use in the UV
• CPC Class Codes: G03F 7/70325 Resolution enhancement techniques not otherwise provided for, e.g. darkfield imaging, interfering beams, spatial frequency multiplication, nearfield lenses or solid immersion lenses

Abstract

An optical system for producing electromagnetic radiation with localized increases in irradiance or radiance at the system output includes a first optical mask containing localized regions for producing controlled modifications of phase delays and/or amplitude attenuations and located within the input plane of said optical system. The system also includes at least a single optical component with positive optical power located after the input plane and at least one additional optical mask located after the optical component at non-conjugate locations with respect to the input plane of the system. The additional optical mask contains localized regions for producing controlled modifications of phase delays. Locally increased radiation distributions are produced at the system output.

Claims

1. A technique for achieving high relative peak output intensity electromagnetic radiation based on diffraction of said radiation by spatially localized amplitude and phase structures within at least two non-conjugate spatial locations, said technique comprised of the following steps:

directing incoming electromagnetic radiation onto an optical system, said optical system containing a first and a second spatial location;

modifying a fraction of said electromagnetic radiation within the first spatial location of the optical system by placing optical elements, including spatially localized attenuators and phase structures into a path of the electromagnetic radiation within said first spatial location and causing controlled diffraction of a fraction of said electromagnetic radiation within the first spatial location;

further directing, with one or more optical elements, diffracted and non-diffracted portions of the electromagnetic radiation to a second non-conjugate spatial location along the radiation path;

further modifying a fraction of the electromagnetic radiation at the second spatial location by placing optical elements containing spatially localized phase structures into the electromagnetic radiation path at said second spatial location and causing controlled diffraction of a fraction of said electromagnetic radiation produced within the second spatial location;

further controlling the electromagnetic radiation at the output of the optical system to achieve high relative peak intensity at the output of the optical system by selecting the fractions of the diffracted and the non-diffracted electromagnetic radiation at the said first and second non-conjugate spatial locations;

wherein said second non-conjugate spatial location is placed within the far field region with respect to the said first spatial location; and

wherein the desired properties of the radiation peaks at the output of the optical system are achieved by selecting the relative sizes, shapes, positions, phase delays and/or attenuation levels of the said spatially localized structures within the first and the second spatial locations within the optical system.

2. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein said controlled modifications of the incoming electromagnetic radiation at the output of the optical system are produced by optical elements containing one or more localized amplitude attenuation regions.

3. The electromagnetic radiation enhancement technique in accordance with claim 2, wherein the number of said localized amplitude attenuation regions within the said optical element located in the input plane of said optical system is more than one.

4. The electromagnetic radiation enhancement technique in accordance with claim 2, wherein a lateral size of said localized amplitude attenuation regions within said optical element located in the input plane is smaller than a lateral size of said incoming electromagnetic radiation.

5. The electromagnetic radiation enhancement technique in accordance with claim 2, wherein a total area occupied by said localized amplitude attenuation regions within said optical element located in the input plane of said optical system is smaller than an area occupied by the electromagnetic radiation within said optical element located in the input plane.

6. The electromagnetic radiation enhancement technique in accordance with claim 2, wherein at least one amplitude attenuation region of said optical element located in the input plane of the optical system is opaque.

7. The electromagnetic radiation enhancement technique in accordance with claim 2, wherein at least one amplitude attenuation region of said optical element located in the input plane of the optical system is at least partially transparent.

8. The electromagnetic radiation enhancement technique in accordance with claim 2, wherein transmission level of at least one amplitude attenuation region of said optical element located in the input plane of the optical system is adjustable.

9. The electromagnetic radiation enhancement technique in accordance with claim 8, wherein said controlled amplitude attenuations of said optical element located in the input plane of the optical system are adjusted to produce specified radiation levels at the output.

10. The electromagnetic radiation enhancement technique according to claim 1, wherein said controlled modifications of the incoming electromagnetic radiation within the input plane are produced with phase optical elements containing one or more localized phase delay regions.

11. The electromagnetic radiation enhancement technique in accordance with claim 10, wherein the number of said localized phase delay regions within the said phase optical element located in the input plane is more than one.

12. The electromagnetic radiation enhancement technique in accordance with claim 10, wherein a lateral size of said localized phase delay regions within the phase optical element located in the input plane is smaller than a lateral size of the incoming radiation.

13. The electromagnetic radiation enhancement technique in accordance with claim 10, wherein a total area occupied by said localized phase delay regions within the said phase optical element located in the input plane is smaller than an area occupied by the electromagnetic radiation within said input plane.

14. The electromagnetic radiation enhancement technique in accordance with claim 10, wherein an optical path difference produced by said phase delay regions of said phase optical element located in the input plane is jλ

/2, where j is an odd integer and λ

is the radiation wavelength.

15. The electromagnetic radiation enhancement technique in accordance with claim 10, wherein an optical path difference produced by said phase delay regions said phase optical element located in the input plane is adjustable.

16. The electromagnetic radiation enhancement technique in accordance with claim 15, wherein said controlled phase delays of said phase optical element located in the input plane of said optical system are adjusted to produce specified radiation levels at the output of the system.

17. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein said further modifications to localized regions of the electromagnetic radiation within said optically non-conjugate location with respect to the input plane are produced with phase optical elements located at the optical system pupil and containing spatially localized phase structures diffracting a portion of said radiation by producing controlled phase delays.

18. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein said further modifications to localized regions of the electromagnetic radiation are produced by phase optical elements located within said optically non-conjugate location with respect to the input plane, and wherein said phase delays are controlled by said optical elements to produce an optical path difference of jλ

/2, where j is an odd integer, and λ

is the radiation wavelength.

19. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein said further modifications to localized regions of the electromagnetic radiation are produced by phase optical elements located within said optically non-conjugate location with respect to the input plane, and wherein said phase delays are adjustable.

20. The electromagnetic radiation enhancement technique in accordance with claim 19, wherein said controlled phase delays produced through the aid of phase optical elements located within said optically non-conjugate location placed within the far field are adjusted to produce a specified radiation levels at the system output.

21. The electromagnetic radiation enhancement technique in accordance with claim 19, wherein said controlled phase delays produced through the aid of phase optical elements located within said optically non-conjugate location placed within the far field are adjusted to produce a specified ratio of enhanced radiation levels to a radiation background at a system output.

22. The electromagnetic radiation enhancement technique according to claim 1, wherein a lateral size of said localized phase delay regions produced by phase optical elements located within said optically non-conjugate location placed within the far field with respect to the input plane is selected to maximize radiation levels at a system output.

23. The electromagnetic radiation enhancement technique according to claim 1, wherein a lateral size of said localized phase delay regions produced by phase optical elements located within said optically non-conjugate location placed within the far field with respect to the input plane is selected to alter a background of electromagnetic radiation in the output plane.

24. The electromagnetic radiation enhancement technique according to claim 1, wherein a lateral size of said localized phase delay regions produced by phase optical elements located within said optically non-conjugate location placed within the far field with respect to the input plane is selected to produce a specified ratio of enhanced radiation to radiation background in the output plane.

25. The electromagnetic radiation enhancement technique according to claim 1, further comprising modifying a lateral position of said optical elements containing localized regions with controlled modifications of phase delays and/or amplitude attenuations within the input plane.

26. The electromagnetic radiation enhancement technique in accordance with claim 25, wherein controlled modifications of said optical elements containing localized regions are adjusted concurrently.

27. The electromagnetic radiation enhancement technique in accordance with claim 26, wherein all controlled modifications of said optical elements containing localized regions are adjusted concurrently to produce specified radiation levels at the output.

28. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein the said optical elements containing spatially localized phase structures at the second optically non-conjugate spatial location within the far field are placed at the stop of the optical system.

29. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein the electromagnetic radiation modified by said spatially localized structures located within the first and the second spatial locations of the optical system far field is further directed, with one or more additional optical elements, to a localized output plane.

30. The electromagnetic radiation enhancement technique in accordance with claim 29, wherein the contrast of the high peak output radiation is further increased due to the reduction in the background of the radiation in the vicinity of the said peak by placing a spatial filter at the said localized output plane containing the peak.

31. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein contrast of the high output peak electromagnetic radiation is further increased due to the reduction in the background of the radiation in the vicinity of the said peak by controlling the values of the localized phase distributions at the second spatial location.

32. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein the lateral position of the high output peak electromagnetic radiation is adjusted by changing magnification of said optical system containing the input plane and the output plane.

33. The electromagnetic radiation enhancement technique in accordance with claim 1, wherein the achieved high output peak electromagnetic radiation is in excess of two times the average output radiation value.