Method for manufacturing semiconductor device
First Claim
1. A semiconductor device comprising:
- a transistor comprising;
a first metal layer;
a first insulating layer over the first metal layer;
an oxide semiconductor film over the first insulating layer;
a second metal layer and a third metal layer over the first insulating layer, the second metal layer and the third metal layer comprising copper; and
a second insulating layer over the oxide semiconductor film, the second metal layer and the third metal layer,wherein the first metal layer is formed by a stack of a first titanium film and a first copper film,wherein the second metal layer and the third metal layer are electrically connected to the oxide semiconductor film,wherein the oxide semiconductor film comprises a channel region of the transistor, andwherein the first metal layer comprises a gate electrode of the transistor.
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Abstract
An object is to establish a processing technique in manufacture of a semiconductor device in which an oxide semiconductor is used. A gate electrode is formed over a substrate, a gate insulating layer is formed over the gate electrode, an oxide semiconductor layer is formed over the gate insulating layer, the oxide semiconductor layer is processed by wet etching to form an island-shaped oxide semiconductor layer, a conductive layer is formed to cover the island-shaped oxide semiconductor layer, the conductive layer is processed by dry etching to form a source electrode, and a drain electrode and part of the island-shaped oxide semiconductor layer is removed by dry etching to form a recessed portion in the island-shaped oxide semiconductor layer.
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Citations
18 Claims
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1. A semiconductor device comprising:
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a transistor comprising; a first metal layer; a first insulating layer over the first metal layer; an oxide semiconductor film over the first insulating layer; a second metal layer and a third metal layer over the first insulating layer, the second metal layer and the third metal layer comprising copper; and a second insulating layer over the oxide semiconductor film, the second metal layer and the third metal layer, wherein the first metal layer is formed by a stack of a first titanium film and a first copper film, wherein the second metal layer and the third metal layer are electrically connected to the oxide semiconductor film, wherein the oxide semiconductor film comprises a channel region of the transistor, and wherein the first metal layer comprises a gate electrode of the transistor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A semiconductor device comprising:
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a transistor comprising; a first metal layer; a first insulating layer over the first metal layer; an oxide semiconductor film over the first insulating layer; a second metal layer and a third metal layer over the first insulating layer, the second metal layer and the third metal layer comprising copper; and a second insulating layer over the oxide semiconductor film, the second metal layer and the third metal layer, wherein the first metal layer is formed by a stack of a first titanium film and a first copper film, wherein the oxide semiconductor film comprises indium, gallium, and zinc, wherein the second metal layer and the third metal layer are electrically connected to the oxide semiconductor film, wherein the oxide semiconductor film comprises a channel region of the transistor, and wherein the first metal layer comprises a gate electrode of the transistor. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification