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Method for manufacturing semiconductor device

  • US 10,211,240 B2
  • Filed: 12/11/2017
  • Issued: 02/19/2019
  • Est. Priority Date: 10/22/2008
  • Status: Active Grant
First Claim
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1. A semiconductor device comprising:

  • a transistor comprising;

    a first metal layer;

    a first insulating layer over the first metal layer;

    an oxide semiconductor film over the first insulating layer;

    a second metal layer and a third metal layer over the first insulating layer, the second metal layer and the third metal layer comprising copper; and

    a second insulating layer over the oxide semiconductor film, the second metal layer and the third metal layer,wherein the first metal layer is formed by a stack of a first titanium film and a first copper film,wherein the second metal layer and the third metal layer are electrically connected to the oxide semiconductor film,wherein the oxide semiconductor film comprises a channel region of the transistor, andwherein the first metal layer comprises a gate electrode of the transistor.

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