Method of manufacturing feedthrough
First Claim
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1. A method of manufacturing a feedthrough comprising:
- mounting a ceramic structure on a mounting groove of a lower jig, the ceramic structure having a plurality of grooves formed uniformly;
inserting a platinum/iridium pin formed of platinum and iridium into the grooves of the ceramic structure;
disposing a titanium flange on the ceramic structure, to form a feedthrough structure having the ceramic structure, the platinum/iridium pin and the titanium flange;
disposing the feedthrough structure on a groove of an upper jig and pressing the feedthrough structure, so that the upper jig is combined with the mounting groove of the lower jig and moves toward a diffusion chamber, for diffusion welding the ceramic structure of the feedthrough structure, the platinum/iridium pin and the titanium flange with each other;
decreasing a temperature of the diffusion chamber for cooling the feedthrough structure welded with each other;
disposing the ceramic structure of the feedthrough structure to face a laser machining device;
irradiating a laser to the ceramic structure into which the platinum/iridium pin is inserted, to form a hole in the ceramic structure; and
moving a melted platinum/iridium pin toward an upper side of the ceramic structure through the hole of the ceramic structure, so that the platinum/iridium pin is partially exposed through the upper side of the ceramic structure.
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Abstract
A method of manufacturing a feedthrough having an enhanced hermetic sealing and used for a human implantable medical device such as a deep brain stimulator, a implantable AED, a implantable spinal cord stimulator and so on. Thus, more enhanced reproducibility and productivity in the diffusion welding and the laser hole machining may be guaranteed in the present method of manufacturing the feedthrough, compared to the conventional method using the ceramic metallizing and the brazing.
128 Citations
5 Claims
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1. A method of manufacturing a feedthrough comprising:
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mounting a ceramic structure on a mounting groove of a lower jig, the ceramic structure having a plurality of grooves formed uniformly; inserting a platinum/iridium pin formed of platinum and iridium into the grooves of the ceramic structure; disposing a titanium flange on the ceramic structure, to form a feedthrough structure having the ceramic structure, the platinum/iridium pin and the titanium flange; disposing the feedthrough structure on a groove of an upper jig and pressing the feedthrough structure, so that the upper jig is combined with the mounting groove of the lower jig and moves toward a diffusion chamber, for diffusion welding the ceramic structure of the feedthrough structure, the platinum/iridium pin and the titanium flange with each other; decreasing a temperature of the diffusion chamber for cooling the feedthrough structure welded with each other; disposing the ceramic structure of the feedthrough structure to face a laser machining device; irradiating a laser to the ceramic structure into which the platinum/iridium pin is inserted, to form a hole in the ceramic structure; and moving a melted platinum/iridium pin toward an upper side of the ceramic structure through the hole of the ceramic structure, so that the platinum/iridium pin is partially exposed through the upper side of the ceramic structure. - View Dependent Claims (2, 3, 4, 5)
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Specification