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Method of manufacturing feedthrough

  • US 10,213,611 B2
  • Filed: 06/29/2016
  • Issued: 02/26/2019
  • Est. Priority Date: 06/30/2015
  • Status: Active Grant
First Claim
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1. A method of manufacturing a feedthrough comprising:

  • mounting a ceramic structure on a mounting groove of a lower jig, the ceramic structure having a plurality of grooves formed uniformly;

    inserting a platinum/iridium pin formed of platinum and iridium into the grooves of the ceramic structure;

    disposing a titanium flange on the ceramic structure, to form a feedthrough structure having the ceramic structure, the platinum/iridium pin and the titanium flange;

    disposing the feedthrough structure on a groove of an upper jig and pressing the feedthrough structure, so that the upper jig is combined with the mounting groove of the lower jig and moves toward a diffusion chamber, for diffusion welding the ceramic structure of the feedthrough structure, the platinum/iridium pin and the titanium flange with each other;

    decreasing a temperature of the diffusion chamber for cooling the feedthrough structure welded with each other;

    disposing the ceramic structure of the feedthrough structure to face a laser machining device;

    irradiating a laser to the ceramic structure into which the platinum/iridium pin is inserted, to form a hole in the ceramic structure; and

    moving a melted platinum/iridium pin toward an upper side of the ceramic structure through the hole of the ceramic structure, so that the platinum/iridium pin is partially exposed through the upper side of the ceramic structure.

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