Micromechanical structure for an acceleration sensor

• US 10,215,772 B2
• Filed: 12/22/2014
• Issued: 02/26/2019
• Est. Priority Date: 02/17/2014
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Classen, Johannes
• Primary Examiner(s): Schmitt, Benjamin R
• Application Number:
  US15/119,010
• Publication Number:
  US 20170052207A1
• Time in Patent Office: 1,527 Days
• Field of Search: 7351402, 7351416, 7351424
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0817 for pivoting movement of the mass, e.g. in-plane pendulum

Abstract

A micromechanical structure for an acceleration sensor, including a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor, spring elements that are fastened on the seismic mass and on at least one fastening element, a rotational motion of the seismic mass being generatable by way of the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis.

Claims

1. A micromechanical structure for an acceleration sensor, comprising:

a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor; and

spring elements that are fastened on the seismic mass and on at least one fastening element;

wherein a rotational motion of the seismic mass is generatable by the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis;

wherein the asymmetry of the seismic mass is brought about by a first additional mass;

wherein a second additional mass is provided in addition to the seismic mass.

2. The micromechanical structure of claim 1, wherein the at least one fastening element is disposed in the rotational Z axis or, in relation to lateral dimensions of the structure, close to the rotational Z axis.

3. The micromechanical structure of claim 1, wherein four spring elements are disposed with respect to one another approximately at an angle of 90 degrees.

4. The micromechanical structure of claim 1, wherein the spring elements are constituted to be tall in relation to their width.

5. The micromechanical structure of claim 4, wherein the spring elements have an aspect ratio of height to width of more than five.

6. The micromechanical structure of claim 1, wherein the at least one fastening element, and fastening elements of electrodes, are disposed close to one another in relation to an area dimension of the structure.

7. The micromechanical structure of claim 6, wherein the at least one fastening element, and fastening elements of electrodes, are spaced away from each other by less than approx. 20% in terms of the largest side dimension of the structure.

8. The micromechanical structure of claim 1, wherein the second additional mass is constituted from a different material than the seismic mass and the first additional mass.

9. The micromechanical structure of claim 1, wherein the first additional mass and/or the second additional mass is disposed at least in part above the seismic mass.

10. A micromechanical structure for an acceleration sensor, comprising:

a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor; and

spring elements that are fastened on the seismic mass and on at least one fastening element;

wherein a rotational motion of the seismic mass about the rotational Z axis is generatable by the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis;

wherein the rotational Z axis is orthogonal to a main extension plane of the seismic mass; and

wherein;

the at least one fastening element includes a fastening element situated in a central area of the seismic mass; and

the spring elements include four spring elements disposed with respect to one another approximately at an angle of 90 degrees, each of the four spring elements connecting the seismic mass to the fastening element situated in the central area of the seismic mass.

11. The micromechanical structure of claim 10, wherein the rotational Z axis is through the fastening element situated in the central area of the seismic mass.

12. An acceleration sensor, comprising:

a micromechanical structure, including;

a seismic mass that is constituted definedly asymmetrically with reference to the rotational Z axis of the structure of the acceleration sensor; and

spring elements that are fastened on the seismic mass and on at least one fastening element; and

fixed electrodes which detect a rotation of the seismic mass;

wherein a rotational motion of the seismic mass about the rotational Z axis is generatable by the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted substantially orthogonally to the rotational Z axis;

wherein the rotational Z axis is orthogonal to a main extension plane of the seismic mass; and

wherein;

the at least one fastening element includes a fastening element situated in a central area of the seismic mass; and

the spring elements include four spring elements disposed with respect to one another approximately at an angle of 90 degrees, each of the four spring elements connecting the seismic mass to the fastening element situated in the central area of the seismic mass.

13. The acceleration sensor of claim 12, wherein the rotational Z axis is through the fastening element situated in the central area of the seismic mass.

14. A method for manufacturing a micromechanical structure for an acceleration sensor, the method comprising:

providing a seismic mass having a defined asymmetry with respect to a rotational Z axis of the structure; and

providing spring elements so that the spring elements are fastened on the seismic mass and on at least one fastening element, so that a rotational motion of the seismic mass about the rotational Z axis is generatable by the spring elements substantially only upon an acceleration in a defined sensing direction within a plane constituted orthogonally to the rotational Z axis;

wherein the rotational Z axis is orthogonal to a main extension plane of the seismic mass;

wherein;

the at least one fastening element includes a fastening element situated in a central area of the seismic mass; and

the spring elements include four spring elements disposed with respect to one another approximately at an angle of 90 degrees, each of the four spring elements connecting the seismic mass to the fastening element situated in the central area of the seismic mass.

15. The method of claim 14, wherein the rotational Z axis is through the fastening element situated in the central area of the seismic mass.