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Efficiently micro-transfer printing micro-scale devices onto large-format substrates

  • US 10,217,730 B2
  • Filed: 02/23/2017
  • Issued: 02/26/2019
  • Est. Priority Date: 02/25/2016
  • Status: Active Grant
First Claim
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1. A method of making a micro-transfer printed system, comprising:

  • providing a source wafer having a plurality of micro-transfer printable source devices arranged in or on the source wafer at a source spatial density;

    providing an intermediate wafer having a plurality of micro-transfer printable intermediate supports arranged in or on the intermediate wafer at an intermediate spatial density less than or equal to the source spatial density;

    providing a destination substrate;

    micro-transfer printing the source devices from the source wafer to the intermediate supports of the intermediate wafer with a source stamp having a plurality of stamp posts at a source transfer density to make an intermediate device on each intermediate support; and

    micro-transfer printing the intermediate devices from the intermediate wafer to the destination substrate at a destination spatial density less than the source spatial density with an intermediate stamp having a plurality of stamp posts at an intermediate transfer density less than the source transfer density.

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