Efficiently micro-transfer printing micro-scale devices onto large-format substrates
First Claim
1. A method of making a micro-transfer printed system, comprising:
- providing a source wafer having a plurality of micro-transfer printable source devices arranged in or on the source wafer at a source spatial density;
providing an intermediate wafer having a plurality of micro-transfer printable intermediate supports arranged in or on the intermediate wafer at an intermediate spatial density less than or equal to the source spatial density;
providing a destination substrate;
micro-transfer printing the source devices from the source wafer to the intermediate supports of the intermediate wafer with a source stamp having a plurality of stamp posts at a source transfer density to make an intermediate device on each intermediate support; and
micro-transfer printing the intermediate devices from the intermediate wafer to the destination substrate at a destination spatial density less than the source spatial density with an intermediate stamp having a plurality of stamp posts at an intermediate transfer density less than the source transfer density.
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Accused Products
Abstract
A method of making a micro-transfer printed system includes providing a source wafer having a plurality of micro-transfer printable source devices arranged at a source spatial density; providing an intermediate wafer having a plurality of micro-transfer printable intermediate supports arranged at an intermediate spatial density less than or equal to the source spatial density; providing a destination substrate; micro-transfer printing the source devices from the source wafer to the intermediate supports of the intermediate wafer with a source stamp having a plurality of posts at a source transfer density to make an intermediate device on each intermediate support; and micro-transfer printing the intermediate devices from the intermediate wafer to the destination substrate at a destination spatial density less than the source spatial density with an intermediate stamp having a plurality of posts at an intermediate transfer density less than the source transfer density.
260 Citations
20 Claims
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1. A method of making a micro-transfer printed system, comprising:
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providing a source wafer having a plurality of micro-transfer printable source devices arranged in or on the source wafer at a source spatial density; providing an intermediate wafer having a plurality of micro-transfer printable intermediate supports arranged in or on the intermediate wafer at an intermediate spatial density less than or equal to the source spatial density; providing a destination substrate; micro-transfer printing the source devices from the source wafer to the intermediate supports of the intermediate wafer with a source stamp having a plurality of stamp posts at a source transfer density to make an intermediate device on each intermediate support; and micro-transfer printing the intermediate devices from the intermediate wafer to the destination substrate at a destination spatial density less than the source spatial density with an intermediate stamp having a plurality of stamp posts at an intermediate transfer density less than the source transfer density. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A system for making a micro-transfer printed device, comprising:
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a source wafer having a plurality of micro-transfer printable source devices arranged in or on the source wafer at a source spatial density; an intermediate wafer having a plurality of micro-transfer printable intermediate supports arranged in or on the intermediate wafer at an intermediate spatial density less than or equal to the source spatial density; a destination substrate; a source stamp having a source transfer density; an intermediate stamp having an intermediate transfer density less than the source transfer density; a micro-transfer printer for micro-transfer printing the source devices from the source wafer to the intermediate supports of the intermediate wafer with a source stamp at a source transfer density to make an intermediate device on each intermediate support; and a micro-transfer printer for micro-transfer printing the intermediate devices from the intermediate wafer to the destination substrate at a destination spatial density less than the source spatial density with an intermediate stamp at an intermediate transfer density less than the source transfer density. - View Dependent Claims (20)
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Specification