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Nozzle device and processing apparatus

  • US 10,220,394 B2
  • Filed: 09/09/2015
  • Issued: 03/05/2019
  • Est. Priority Date: 11/05/2014
  • Status: Active Grant
First Claim
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1. A nozzle device comprising:

  • a first opening;

    a plurality of second openings; and

    a first duct part including first branching parts each having a first part extending in a first direction and a plurality of second parts connected to a first end of the first part and extending in respective directions intersecting with the first direction, the first duct part connecting the first opening and the second openings, branched at least once by the first branching parts in a path from the first opening to the second openings, and having the same path length and the same number of first branching parts between the first opening and the second openings, whereinthe cross-sectional area of the first end of the first part is smaller than the cross-sectional area of a second end of the first part,the first part of one of the first branching parts is orthogonal to one of the second parts of another of the first branching parts,the cross-sectional shape of the first part has a first length and a second length,the first length is a length in the direction in which the one of the second parts of the another of the first branching parts extends in a planar view from a direction in which the first part extends,the second length is a length in a second direction orthogonal both to the first direction and to the direction in which the one of the second parts of the another of the first branching parts extends, andthe first length is smaller than the second length.

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