Thermomechanical device for measuring electromagnetic radiation

• US 10,222,265 B2
• Filed: 08/19/2016
• Issued: 03/05/2019
• Est. Priority Date: 08/19/2016
• Status: Active Grant

• Current Assignee: Obsidian Sensors, Inc.
• Original Assignee: Obsidian Sensors, Inc.
• Inventors: Chan, Edward, Wen, Bing
• Primary Examiner(s): Porta, David
• Assistant Examiner(s): Malevic, Djura
• Application Number:
  US15/241,742
• Publication Number:
  US 20180052056A1
• Time in Patent Office: 928 Days
• CPC Class Codes: G01J 5/023 Particular leg structure or construction or shape; Nanotubes
• CPC Class Codes: G01J 5/024 Special manufacturing steps or sacrificial layers or layer structures
• CPC Class Codes: G01J 5/40 using bimaterial elements

Abstract

Methods and devices are disclosed for sensing radiation emitted by an object. For example, one device includes a substrate and a movable layer coupled to the substrate. The movable layer is configured to receive radiation from the object and move relative to the substrate to a position in response to a change in temperature. The device also includes a sensor that is configured to produce a signal responsive to the position of the movable layer. The signal is indicative of the radiation emitted by the object.

Claims

1. A device for sensing thermal radiation emitted by an object, comprising:

a substrate;

a plurality of movable layers configured to receive thermal radiation from the object and move relative to the substrate to a position in response to a change in received thermal radiation;

a sensor configured to produce a signal responsive to the position of the movable layer, the signal indicative of the thermal-radiation emitted by the object; and

a frame coupled to the substrate and the plurality of movable layers, wherein the frame is thermally isolated from the substrate and the plurality of movable layers.

2. The device of claim 1, wherein the movable layer comprises an absorber layer configured to absorb infrared radiation.

3. The device of claim 2, wherein the movable layer further comprises a reflector that is partially transmissive and partially reflective of visible light.

4. The device of claim 3, wherein the substrate comprises a first side and a second side, the second side being proximate to the movable layer, and wherein the device further comprises a visible light absorber layer positioned between the reflector and the first side of the substrate.

5. The device of claim 4, wherein the sensor comprises a light sensing element configured to detect an optical signal indicative of the position of the movable layer.

6. The device of claim 2, wherein the substrate comprises a first side and a second side, the second side being proximate to the movable layer, wherein the movable layer comprises a conductive layer positioned between the absorber layer and the second side of the substrate, wherein the sensor includes a conductor disposed on the second side of the substrate and in electrical communication with the conductive layer, and wherein the sensor is configured to produce the signal based on a difference in capacitance as measured between the conductive layer and the sensor.

7. The device of claim 1, wherein the movable layer is configured to move relative to the frame in response to thermal radiation emitted by the object, and wherein the frame is configured to move relative to the substrate in response to ambient radiation incident on the device.

8. The device of claim 1, further comprising a plurality of beams each having a first end and a second end, each beam coupled at a first end to the frame, and each beam coupled at a second end to the movable layer.

9. The device of claim 8, wherein the coupling of the second end to the movable layer is configured to conduct thermal energy from the movable layer to the beam, each beam being configured to deform in response to a temperature change of the beam.

10. The device of claim 9, wherein the deformation of the plurality of beams moves the movable layer relative to the substrate.

11. The device of claim 8, wherein the movable layer includes a plurality of planar structures each coupled to one or more of the plurality of beams.

12. The device of claim 8, wherein each of the plurality of beams comprise a mechanical discontinuity, the mechanical discontinuity causing the beam to change the position of the movable layer relative to the substrate in response to the temperature change of the beam.

13. A method for sensing thermal radiation emitted by an object, the method comprising:

receiving radiation on a substrate coupled to a frame by a hinge configured to isolate the frame from contraction and expansion in the substrate;

receiving radiation from the object on a plurality of movable layers, the movable layers coupled to and thermally isolated from the frame; and

producing a signal, by a sensor, responsive to a change in position of the movable layers relative to the substrate in response to a change in received thermal radiation, the signal indicative of the thermal radiation emitted by the object.

14. The method of claim 13, wherein the movable layer is coupled to the substrate by a beam, the movable layer configured to conduct thermal energy from the movable layer to the beam causing the beam to deform in response to a change in temperature.

15. The method of claim 14, wherein deforming the beam moves the movable layer, coupled to the beam, relative to the substrate.

16. A device for sensing thermal radiation emitted by an object, comprising:

first means for receiving radiation coupled to a third means by a fourth means configured to isolate the third means from contraction and expansion in the first means;

second means for receiving radiation coupled to and thermally isolated from the third means;

and

means for producing a signal responsive to a change in position of the second means for receiving radiation relative to the first means for receiving radiation, the signal indicative of the thermal radiation emitted by the object.

17. A device for sensing thermal radiation emitted by an object, comprising:

a substrate;

a movable layer configured to receive thermal radiation from the object;

a plurality of beams each having a first end coupled to the substrate and a second end coupled to the movable layer, wherein each beam is configured to

receive thermal energy from the moveable layer,

deform in response to a change in received thermal energy, and

thereby move the moveable layer relative to the substrate; and

a sensor configured to produce a signal responsive to movement of the movable layer relative to the substrate, the signal indicative of the thermal radiation emitted by the object.

18. The device of claim 17, wherein the moveable layer comprises a plurality of sensing elements.

19. The device of claim 17, wherein the sensor is configured to produce an interferometric modulation effect based on a distance between the moveable layer and the substrate.

20. The device of claim 17, wherein each of the plurality of beams comprises an elongated beam having a length between the first and second ends that is longer than its width.

21. The device of claim 17, wherein each of the plurality of beams comprises a discontinuity configured to deform the respective beam in a specific direction.

22. The device of claim 17, wherein each of the plurality of beams is coupled to the substrate with a connector configured to thermally isolate the respective beam from the substrate.

23. The device of claim 17, wherein each of the plurality of beams is coupled to the substrate with a frame coupled at one end to the respective beam and at another end to the substrate.

24. A method for sensing thermal radiation emitted by an object, the method comprising:

receiving thermal energy on a beam coupled at a first end to a substrate and a second end to a moveable layer;

deforming the beam in response to a change in received thermal energy;

in response to deforming the beam, moving the moveable layer relative to the substrate; and

producing a signal, by a sensor, responsive to movement of the movable layer relative to the substrate and indicative of thermal radiation emitted by the object.

25. A device for sensing thermal radiation emitted by an object, comprising:

a first means for

receiving thermal energy, the first means coupled at a first end to a second means and at a second end to a third means,

deforming in response to a change in received thermal energy, and

in response to deforming, moving the third means relative to the second means; and

a fourth means for producing a signal responsive to movement of the third means relative to the seconds means and indicative of thermal radiation emitted by the object.