Inline concentration measurement device
First Claim
1. An inline concentration measurement device, comprising:
- a measurement cell main body in which a gas flow path is formed;
a light incident part having a window member and being connected to the measurement cell main body; and
a light receiving part having a window member and being connected to the measurement cell main body, whereinthe gas flow path includes a gas flow path part for an optical path including a first end and a second end extending straight between the window member of the light incident part at the first end and the window member of the light receiving part to provide the optical path at the second end, a first communication part making a gas inlet formed in the measurement cell main body communicate with the gas flow path part for the optical path, and a second communication part making a gas outlet formed in the measurement cell main body communicate with the gas flow path part for the optical path,the first communication part extends straight from a first point at the gas inlet toward a second point at the first end of the gas flow path part for an optical path, the first point nearer than the second point to a plane perpendicular to a center of the gas flow path part for an optical path,the first communication part obliquely extends from the gas inlet towards a surface of the window member of the light incident part, andthe first communication part is connected to the gas flow path part for an optical path at an acute angle with respect to a longitudinal axis of the gas flow path part for an optical path to form the gas flow path bending at the acute angle, and a connection portion of the first communication part and the gas flow path part for the optical path is located in a vicinity of the window member of the light incident part.
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Accused Products
Abstract
An inline concentration measurement device comprises: a measurement cell main body with a gas flow path formed; a light incident part with a window member connected to the main body; and a light receiving part with a window member connected to the main body, wherein the gas flow path includes a gas flow path for an optical path extending straight between the window members of the light incident part and the light receiving part, a first communication part making a gas inlet formed in the main body communicate with the gas flow path part for the optical path, and a second communication part making a gas outlet formed in the main body communicate with the gas flow path part for the optical path, and the first communication part obliquely extends from the gas inlet towards the window member of the light incident part.
19 Citations
21 Claims
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1. An inline concentration measurement device, comprising:
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a measurement cell main body in which a gas flow path is formed; a light incident part having a window member and being connected to the measurement cell main body; and a light receiving part having a window member and being connected to the measurement cell main body, wherein the gas flow path includes a gas flow path part for an optical path including a first end and a second end extending straight between the window member of the light incident part at the first end and the window member of the light receiving part to provide the optical path at the second end, a first communication part making a gas inlet formed in the measurement cell main body communicate with the gas flow path part for the optical path, and a second communication part making a gas outlet formed in the measurement cell main body communicate with the gas flow path part for the optical path, the first communication part extends straight from a first point at the gas inlet toward a second point at the first end of the gas flow path part for an optical path, the first point nearer than the second point to a plane perpendicular to a center of the gas flow path part for an optical path, the first communication part obliquely extends from the gas inlet towards a surface of the window member of the light incident part, and the first communication part is connected to the gas flow path part for an optical path at an acute angle with respect to a longitudinal axis of the gas flow path part for an optical path to form the gas flow path bending at the acute angle, and a connection portion of the first communication part and the gas flow path part for the optical path is located in a vicinity of the window member of the light incident part. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An inline concentration measurement device, comprising:
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a measurement cell main body in which a gas flow path is formed; a light incident part having a window member and being connected to the measurement cell main body; and a light receiving part having a window member and being connected to the measurement cell main body, wherein the gas flow path includes a gas flow path part for an optical path including a first end and a second end extending straight between the window member of the light incident part at the first end and the window member of the light receiving part at the second end to provide the optical path, a first communication part making a gas inlet formed in the measurement cell main body communicate with the gas flow path part for the optical path, and a second communication part making a gas outlet formed in the measurement cell main body communicate with the gas flow path part for the optical path, the first communication part extends straight from a first point at the gas inlet toward a second point at the first end of the gas flow path part for an optical path, the first point nearer than the second point to a plane perpendicular to a center of the gas flow path part for an optical path, the second communication part obliquely extends from the gas outlet towards a surface of the window member of the light receiving part, and the second communication part is connected to the gas flow path part for an optical path at an acute angle with respect to a longitudinal axis of the gas flow path part for an optical path to form the gas flow path bending at the acute angle, and a connection portion of the second communication part and the gas flow path part for the optical path is located in a vicinity of the window member of the light receiving part. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification