Sensor device including one or more metal-dielectric optical filters

• US 10,222,523 B2
• Filed: 09/19/2016
• Issued: 03/05/2019
• Est. Priority Date: 12/19/2012
• Status: Active Grant

• Current Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Original Assignee: Viavi Solutions, Inc. (Lumentum Holdings Inc.)
• Inventors: Ockenfuss, Georg J.
• Primary Examiner(s): Tallman, Robert E.
• Application Number:
  US15/269,483
• Publication Number:
  US 20170068025A1
• Time in Patent Office: 897 Days
• Field of Search: 359359-361, 359577, 359580-582, 359585-590
• CPC Class Codes: G01J 3/0256 Compact construction
• CPC Class Codes: G01J 3/0259 Monolithic
• CPC Class Codes: G01J 3/26 using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
• CPC Class Codes: G02B 1/14 Protective coatings, e.g. hard coatings
• CPC Class Codes: G02B 5/201 in the form of arrays
• CPC Class Codes: G02B 5/208 for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
• CPC Class Codes: G02B 5/283 designed for the ultraviolet
• CPC Class Codes: H01L 27/14625 Optical elements or arrangements associated with the device

Abstract

A sensor device including one or more sensor elements and one or more optical filters is provided. The one or more optical filters each include a plurality of dielectric layers and a plurality of metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

Claims

1. An optical filter comprising:

a plurality of dielectric layers;

a plurality of metal layers stacked in alternation with the plurality of dielectric layers, wherein

each of the plurality of dielectric layers has a tapered edge at a periphery of the optical filter,

each of the plurality of metal layers is encapsulated by one or more of the plurality of dielectric layers, and

each of the plurality of metal layers is separated from a substrate of the optical filter using at least one of the plurality of dielectric layers; and

one or more corrosion-suppressing layers substantially encapsulating a metal layer of the plurality of metal layers.

2. The optical filter of claim 1, wherein the optical filter has a substantially flat top and sloped sides.

3. The optical filter of claim 1, wherein each of the plurality of metal layers has a tapered edge, at the periphery of the optical filter, that is encapsulated by one or more of the plurality of dielectric layers.

4. The optical filter of claim 1, where the one or more corrosion-suppressing layers comprise:

a corrosion-suppressing layer disposed between a dielectric layer, of the plurality of dielectric layers, and the metal layer.

5. The optical filter of claim 1, wherein each metal layer, of the plurality of metal layers, is encapsulated by the one or more corrosion-suppressing layers.

6. The optical filter of claim 1, further comprising:

a dielectric coating deposited on the optical filter.

7. The optical filter of claim 1, wherein the optical filter is disposed on a sensor element.

8. The optical filter of claim 7, wherein

the sensor element is one of a plurality of sensor elements, and

the optical filter is one of a plurality of optical filters.

9. The optical filter of claim 8, wherein

the plurality of sensor elements are disposed in a two-dimensional array, and

the plurality of optical filters are disposed in a corresponding two-dimensional array.

10. The optical filter of claim 8, wherein the plurality of optical filters includes different types of optical filters having different passbands.

11. The optical filter of claim 10, wherein at least two of the different types of optical filters have at least one of:

different quantities of metal layers from one another, or

different metal-layer thicknesses from one another.

12. The optical filter of claim 1, wherein the metal layer has a different thickness than at least one other metal layer of the plurality of metal layers.

13. The optical filter of claim 1, wherein each of the plurality of metal layers is composed of silver or a silver alloy.

14. The optical filter of claim 1, wherein each of the plurality of dielectric layers is composed of a high-index dielectric material.

15. The optical filter of claim 14, wherein the high-index dielectric material is ultraviolet-absorbing.

16. The optical filter of claim 1, wherein the optical filter is formed by a lift off process.

17. The optical filter of claim 16, wherein the lift off process includes:

applying a photoresist layer onto the substrate;

patterning the photoresist layer;

depositing a multilayer stack on the patterned photoresist layer;

depositing a multilayer stack on a filter region of the substrate;

removing the photoresist layer; and

removing the multilayer stack deposited on the patterned photoresist layer.

18. The optical filter of claim 17, wherein patterning the photoresist layer includes forming an overhang in the photoresist layer.

19. The optical filter of claim 17, wherein the lift off process further includes:

depositing a dielectric coating on the optical filter.

20. The optical filter of claim 1, wherein each of the one or more corrosion-suppressing layers includes ZnO.