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Polymer pen lithography

  • US 10,222,694 B2
  • Filed: 05/19/2016
  • Issued: 03/05/2019
  • Est. Priority Date: 04/25/2008
  • Status: Active Grant
First Claim
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1. A tip array comprising a plurality of tips fixed to a common substrate layer, the common substrate layer adhered to an at least translucent rigid support, the tips and common substrate layer formed from an elastomeric polymer, the elastomeric polymer of the tips having a compression modulus of about 10 MPa to about 300 MPa, and each tip having a radius of curvature of less than about 1 μ

  • m, and the plurality of tips, common substrate layer, and rigid support together are at least translucent.

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