Multi-electrode molecular sensing devices and methods of making the same
First Claim
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1. A method of manufacturing a structure usable in a molecular sensor device, the method comprising:
- providing a substrate that defines a substrate plane and further comprises a protrusion protruding from the substrate at an angle to the substrate plane;
depositing a first electrode layer on the substrate to form a first electrode sheet;
depositing an inner dielectric layer on the first electrode sheet to form an inner dielectric sheet;
depositing a second electrode layer on the inner dielectric sheet to form a second electrode sheet;
depositing an outer dielectric layer on the second electrode sheet to form an outer dielectric sheet,planarizing the first and second electrode sheets, the inner dielectric sheet, and the outer dielectric sheet;
removing an exposed end portion of the inner dielectric sheet to form a groove located on an exposed end portion of the inner dielectric sheet; and
connecting first and second lead conductors to the first and second electrode sheets,wherein the steps of depositing the first electrode layer, depositing the inner dielectric layer, depositing the second electrode layer, and depositing the outer dielectric layer are at an oblique angle to the substrate plane, resulting in additional depositing of the layers along a side of the layers along a side of the protrusion at the angle to the substrate plane, andwherein the inner dielectric layer is deposited with a first thickness, and wherein the outer dielectric layer is deposited with a second thickness of at least one order of magnitude greater than the first thickness.
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Abstract
A molecular sensor includes a substrate defining a substrate plane, and a plurality of pairs of electrode sheets above or below the substrate at an angle to the substrate plane. The molecular sensor further includes a plurality of inner dielectric sheets between each electrode sheet in each pair of electrode sheets of the plurality of pairs, and an outer dielectric sheet between each pair of electrode sheets of the plurality of pairs.
174 Citations
9 Claims
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1. A method of manufacturing a structure usable in a molecular sensor device, the method comprising:
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providing a substrate that defines a substrate plane and further comprises a protrusion protruding from the substrate at an angle to the substrate plane; depositing a first electrode layer on the substrate to form a first electrode sheet; depositing an inner dielectric layer on the first electrode sheet to form an inner dielectric sheet; depositing a second electrode layer on the inner dielectric sheet to form a second electrode sheet; depositing an outer dielectric layer on the second electrode sheet to form an outer dielectric sheet, planarizing the first and second electrode sheets, the inner dielectric sheet, and the outer dielectric sheet; removing an exposed end portion of the inner dielectric sheet to form a groove located on an exposed end portion of the inner dielectric sheet; and connecting first and second lead conductors to the first and second electrode sheets, wherein the steps of depositing the first electrode layer, depositing the inner dielectric layer, depositing the second electrode layer, and depositing the outer dielectric layer are at an oblique angle to the substrate plane, resulting in additional depositing of the layers along a side of the layers along a side of the protrusion at the angle to the substrate plane, and wherein the inner dielectric layer is deposited with a first thickness, and wherein the outer dielectric layer is deposited with a second thickness of at least one order of magnitude greater than the first thickness. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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