Laser-based Fourier ptychographic imaging systems and methods

• US 10,228,550 B2
• Filed: 05/20/2016
• Issued: 03/12/2019
• Est. Priority Date: 05/21/2015
• Status: Active Grant

• Current Assignee: California Institute of Technology
• Original Assignee: California Institute of Technology
• Inventors: Ou, Xiaoze, Chung, Jaebum, Yang, Changhuei
• Primary Examiner(s): Hansen, Jonathan M
• Application Number:
  US15/160,941
• Publication Number:
  US 20160341945A1
• Time in Patent Office: 1,026 Days
• CPC Class Codes: G01N 2021/8822 Dark field detection
• CPC Class Codes: G01N 21/8806 Specially adapted optical and illumination features
• CPC Class Codes: G01N 21/8851 Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges G01N21/8806 and G01N21/93 - G01N21/95692 take precedence; optical measurement of dimensions G01B11/00; optical scanning G02B26/10; image transformation G06T3/00; computerised image enhancement G06T5/00; image processing per se for flaw detection G06T7/0002
• CPC Class Codes: G01N 21/956 Inspecting patterns on the surface of objects contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H01L22/10
• CPC Class Codes: G01N 2201/06113 Coherent sources; lasers
• CPC Class Codes: G02B 21/0032 Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06
• CPC Class Codes: G02B 21/0048 scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
• CPC Class Codes: G02B 21/086 for transillumination only
• CPC Class Codes: G02B 21/367 providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: H04N 23/56 provided with illuminating means
• CPC Class Codes: H04N 7/18 Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast

Abstract

Certain embodiments pertain to laser-based Fourier ptychographic (LFP) imaging systems, angle direction devices used in the LFP imaging systems, optical switches used in the LFP imaging systems, and LFP imaging methods. The LFP systems include an angle direction device for directing laser light to a sample plane at a plurality of illumination angles at different sample times. The LFP systems also include an optical system and a light detector. The optical system receives light issuing from the sample being imaged and propagates and focuses the light to the light detector acquiring raw intensity images.

Claims

1. A laser-based Fourier ptychographic imaging system, comprising:

an angle direction device configured to direct laser light from a laser light source to a specimen surface at a sequence of illumination angles;

an optical system comprising a collection element and a focusing element, the collection element configured to receive light issuing from a specimen when it is located on the specimen surface, wherein the sequence of illumination angles and a numerical aperture of the collection element correspond to overlapping regions in a Fourier domain; and

a light detector configured to receive light focused by the focusing element from the optical system and acquire a plurality of intensity images of the specimen when it is located on the specimen surface and illuminated, each intensity image corresponding to a different illumination angle of the sequence of illumination angles.

2. The laser-based Fourier ptychographic imaging system of claim 1, further comprising a processor configured to execute instructions for iteratively updating overlapping regions in the Fourier domain with the plurality of intensity images acquired by the light detector.

3. The laser-based Fourier ptychographic imaging system of claim 1, wherein the plurality of intensity images are acquired in less than 1 second.

4. The laser-based Fourier ptychographic imaging system of claim 2, wherein the processor is further configured to execute instructions for filtering out low spatial frequency artifacts associated laser light by using a differential phase contrast deconvolution procedure.

5. The laser-based Fourier ptychographic imaging system of claim 1, wherein the angle direction device comprises:

a plurality of mirrors, each fixed mirror oriented to reflect laser light at one of the plurality of illumination angles to the specimen surface; and

one or more rotatable mirrors configured to reflect laser light from the laser light source sequentially to different mirrors of the plurality of mirrors at different sampling times,

wherein the plurality of mirrors are oriented to reflect laser light received from the one or more rotatable mirrors to the specimen surface at the sequence of illumination angles.

6. The laser-based Fourier ptychographic imaging system of claim 5, wherein the one or more rotatable mirrors comprise:

a first rotatable mirror configured to rotate along a first axis; and

a second rotatable mirror configured to rotate along a second axis orthogonal to the first axis;

wherein the first rotatable mirror is configured to reflect laser light from the laser light source to the first rotatable mirror and the second rotatable mirror is configured to reflect light from the first rotatable mirror to one of the plurality of mirrors,

wherein the first rotatable mirror and second rotatable mirror are configured to rotate to direct laser light to different mirrors of the plurality of mirrors to direct laser light at the sequence of illumination angles.

7. The laser-based Fourier ptychographic imaging system of claim 5, wherein the one or more rotatable mirrors comprise a dual axis rotatable mirror configured to rotate along two orthogonal axes to reflect laser light from the laser light source to different mirrors of the plurality of mirrors to direct laser light at the sequence of illumination angles.

8. The laser-based Fourier ptychographic imaging system of claim 5, wherein the plurality of mirrors are arranged in concentric rings along a bowl-shaped surface.

9. The laser-based Fourier ptychographic imaging system of claim 5, wherein the plurality of mirrors are arranged in a flat structure.

10. The laser-based Fourier ptychographic imaging system of claim 5, wherein each mirror of the plurality of mirrors comprises a neutral density filter.

11. The laser-based Fourier ptychographic imaging system of claim 1, wherein the angle direction device comprises:

a plurality of optical fibers, each optical fibers having first and second end portions; and

one or more optical switches in optical communication with the laser light source, the one or more optical switches configured to switch at different sampling times to direct laser light from the laser light source to the first end portion of different optical fibers of the plurality of optical fibers when the laser light source is activated;

wherein the plurality of optical pathways are configured so that each second end portion directs laser light to one of the sequence of illumination angles when the one or more optical switches is switched to the corresponding optical fiber and the laser light source is activated.

12. The laser-based Fourier ptychographic imaging system of claim 1, wherein in the angle direction device comprises:

a movable stage; and

an optical fiber coupled to the movable stage and optically coupled at one end to the laser light source,

wherein the movable stage is configured or configurable to translate and/or rotate the optical fiber to direct laser light from the other end of the optical fiber to illuminate the specimen surface at the plurality of illumination angles at the different sampling times.

13. The laser-based Fourier ptychographic imaging system of claim 12, wherein the movable stage is an X-Y stage, and wherein the optical fiber is coupled to the X-Y stage with a connector.

14. The laser-based Fourier ptychographic imaging system of claim 1, wherein in the angle direction device comprises:

one or more rotatable mirrors; and

a lens system,

wherein the one or more rotatable mirrors are configurable to direct the laser light from the laser light source to the specimen surface through a lens system, the lens system configured such that rotation of the one or more rotatable mirrors causes the laser light to illuminate the specimen at the sequence of illumination angles.

15. The laser-based Fourier ptychographic imaging system of claim 14, wherein the lens system comprises a first lens and a second lens, configured such that a back-focal plane of the first lens coincides with a focal plane of the second lens, and wherein at least one of the first and second lenses is a f-theta lens.

16. A laser angle direction device for directing laser light sequentially through a plurality of different illumination angles, the laser angle direction device comprising:

a surface; and

a plurality of mirrors coupled to the surface, each mirror oriented to receive laser light from a laser light source and reflect the laser light to one of the plurality of illumination angles to a specimen surface, wherein the laser angle direction device is configured to provide the laser light from the light source sequentially to each one of the plurality of mirrors at a different sampling time during operation.

17. The laser angle direction device of claim 16, further comprising one or more rotatable mirrors configured to reflect the laser light from the light source sequentially to each of the plurality of mirrors at different sampling times.

18. The laser angle direction device of claim 16, wherein the surface is bowl-shaped.

19. The laser angle direction device of claim 16,

wherein the surface is flat;

further comprising a plurality of structures attached to the flat surface,

wherein each of the mirrors is attached to one end of one of the structures, and the other end of the structures is attached to the surface.

20. The laser angle direction device of claim 16, wherein each mirror comprises a neutral density filter.

22. The laser angle direction device of claim 16, wherein light issuing from a sample being imaged on the specimen surface is received by a light detector via an optical system, and wherein a plurality of images of the sample is acquired by the light detector during operation, each image based on a different illumination angle.

21. A laser-based Fourier ptychographic imaging method employing a laser light source, the method comprising:

directing laser light from the laser light source to a specimen surface located at about a sample plane using an angle direction device at a sequence of illumination angles;

receiving light, at a light detector, issuing from a sample when the sample is located on the specimen surface, the light received from an optical system;

acquiring a plurality of intensity images based on light received at the light detector, wherein each intensity image corresponds to one of the illumination angles; and

constructing a higher resolution image by simultaneously updating a pupil function and a sample spectrum, wherein the sample spectrum is updated in overlapping regions with Fourier transformed intensity images, wherein each of the overlapping regions corresponds to one of the plurality of illumination angles.