Showerhead assembly with multiple fluid delivery zones

• US 10,233,543 B2
• Filed: 12/10/2015
• Issued: 03/19/2019
• Est. Priority Date: 10/09/2015
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Bansal, Amit Kumar, Rocha-Alvarez, Juan Carlos, Baluja, Sanjeev, Kim, Sam H., Nguyen, Tuan Anh
• Primary Examiner(s): Tadesse, Yewebdar T
• Application Number:
  US14/965,061
• Publication Number:
  US 20170101712A1
• Time in Patent Office: 1,195 Days
• Field of Search: 118715, 118723 E, 15634534, 15634546, 216 67, 239548
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45574 Nozzles for more than one gas

Abstract

The present disclosure relates to a semiconductor processing apparatus. The processing chamber includes a chamber body and lid defining an interior volume, a substrate support disposed in the interior volume and a showerhead assembly disposed between the lid and the substrate support. The showerhead assembly includes a faceplate configured to deliver a process gas to a processing region defined between the showerhead assembly and the substrate support and a underplate positioned above the faceplate, defining a first plenum between the lid and the underplate, the having multiple zones, wherein each zone has a plurality of openings that are configured to pass an amount of inert gas from the first plenum into a second plenum defined between the faceplate and the underplate, in fluid communication with the plurality of openings of each zone such that the inert gas mixes with the process gas before exiting the showerhead assembly.

Claims

1. A showerhead assembly, comprising:

a faceplate having a first side and a second side, the faceplate having a plurality of apertures configured to deliver a process gas from the first side to the second side;

an underplate positioned adjacent the first side of the faceplate, the underplate partitioning multiple zones, wherein each zone has a plurality of apertures that are configured to pass inert gas through the underplate into a first plenum defined between the faceplate and the underplate, wherein the inert gas mixes with the process gas in the first plenum; and

a diffuser plate disposed between the faceplate and the underplate, wherein the diffuser plate comprises a plurality of apertures configured to pass the inert gas mixed with the process gas from the first plenum to a second plenum defined between the faceplate and the underplate.

2. The showerhead assembly of claim 1, wherein the plurality of apertures in the underplate are grouped to the multiple zones.

3. The showerhead assembly of claim 1, wherein the plurality of apertures in the faceplate are positioned beneath the plurality of zones of the underplate.

4. The showerhead assembly of claim 1, wherein the inert gas is delivered to the first plenum by a plurality of gas lines, wherein each gas line comprises:

a valve configured to open and close the gas line; and

an orifice configured to control a flow rate of the inert gas through the gas line.

5. The showerhead assembly of claim 1, wherein the plurality of zones formed in the underplate corresponds to a plurality of zones in the faceplate.

6. The showerhead assembly of claim 1, wherein each zone is provided with a different concentration of inert gas.

7. The showerhead assembly of claim 1, wherein each zone is coupled to a flow ratio control device.

8. The showerhead assembly of claim 1, wherein the first plenum is defined between the underplate and the diffuser plate, and the second plenum is defined between the diffuser plate and the faceplate.

9. A processing chamber, comprising:

a substrate support assembly; and

a shower head assembly disposed above the substrate support assembly, wherein the showerhead assembly comprises;

a faceplate having a first side and a second side, the faceplate having a plurality of apertures configured to deliver a process gas from the first side to the second side;

an underplate positioned adjacent the first side of the faceplate, the underplate partitioning multiple zones, wherein each zone has a plurality of apertures that are configured to pass inert gas through the underplate into a first plenum defined between the faceplate and the underplate, wherein the inert gas mixes with the process gas in the first plenum; and

a diffuser plate disposed between the faceplate and the underplate, wherein the diffuser plate comprises a plurality of apertures configured to pass the inert gas mixed with the process gas to a second plenum defined between the faceplate and the underplate.

10. The processing chamber of claim 9, wherein the plurality of apertures in the underplate are grouped to the multiple zones.

11. The processing chamber of claim 9, wherein the plurality of apertures in the faceplate are positioned beneath the plurality of zones of the underplate.

12. The processing chamber of claim 9, wherein the inert gas is delivered to the first plenum by a plurality of gas lines, wherein each gas line comprises:

a valve configured to open and close the gas line; and

an orifice configured to control a flow rate of the inert gas through the gas line.

13. The processing chamber of claim 9, wherein the plurality of zones formed in the underplate corresponds to a plurality of zones in the faceplate.

14. The processing chamber of claim 9, wherein each zone is provided with a different concentration of inert gas.

15. The processing chamber of claim 9, wherein each zone is coupled to a flow ratio control device.

16. The showerhead assembly of claim 9, wherein the first plenum is defined between the underplate and the diffuser plate, and the second plenum is defined between the diffuser plate and the faceplate.