Vacuum valve

• US 10,234,059 B2
• Filed: 08/22/2017
• Issued: 03/19/2019
• Est. Priority Date: 08/22/2016
• Status: Active Grant

• Current Assignee: VAT Holding AG (VAT Group AG)
• Original Assignee: VAT Holding AG (VAT Group AG)
• Inventors: Ehrne, Florian, Seitz, Daniel, Hofer, Andreas
• Primary Examiner(s): Sanchez-Medina, Reinaldo
• Assistant Examiner(s): Do, Hailey K
• Application Number:
  US15/682,673
• Publication Number:
  US 20180051825A1
• Time in Patent Office: 574 Days
• CPC Class Codes: F16K 3/18 by movement of the closure members
• CPC Class Codes: F16K 3/184 by means of cams
• CPC Class Codes: F16K 3/188 by means of hydraulic forces
• CPC Class Codes: F16K 31/02 electric F16K31/004 takes precedence; magnetic
• CPC Class Codes: F16K 31/122 the fluid acting on a piston F16K31/143, F16K31/163, F16K31/363, F16K31/383 take precedence
• CPC Class Codes: F16K 31/1225 with a plurality of pistons
• CPC Class Codes: F16K 51/02 specially adapted for high-vacuum installations

Abstract

A vacuum valve including a valve body with first and second valve openings, first and second closure elements attached to a valve rod, a longitudinally adjustable transmission piece attached to the valve rod that is adjustable from an open position into an intermediate position, and in a transverse adjustment direction from the intermediate position into a first closing position, and counter thereto into a second closing position. The transmission piece is connected to the valve body via a longitudinal stroke linear guide and a transverse stroke linear guide having a transverse stroke guide part which extends parallel to an oblique adjustment direction and a transverse stroke carriage displaceably guided thereon. To adjust the transmission piece from the intermediate position into the first or second closing position, the transverse stroke carriage is linearly displaceable in or counter to the oblique adjustment direction from a central position into a first or second press-on position.

Claims

1. A vacuum valve, comprising:

a valve body with a first valve opening which has a first axis and is surrounded by a first valve seat, and with a second valve opening which has a second axis and is surrounded by a second valve seat,

a first closure element and a second closure element attached to a valve rod,

a transmission piece attached to the valve rod that is adjustable in a longitudinal adjustment direction from an open position, in which the first and the second closure elements open up the first and second valve openings, into an intermediate position, in which the first and the second closure elements overlap the first and second valve openings, but are raised from the first and second valve seats, and which is adjustable in a transverse adjustment direction from the intermediate position into a first closing position, in which the first closure element lies against the first valve seat, and counter to the transverse adjustment direction from the intermediate position into a second closing position, in which the second closure element lies against the second valve seat,

a longitudinal stroke drive by which the transmission piece is adjustable from the open position into the intermediate position,

a longitudinal stroke linear guide having a longitudinal stroke guide part extending parallel to the longitudinal adjustment direction and a longitudinal stroke carriage guided displaceably by the longitudinal stroke guide part, wherein, for adjustment of the transmission piece from the open position into the intermediate position, the longitudinal stroke carriage is displaceable linearly in relation to the longitudinal stroke guide part, or the longitudinal stroke guide part is displaceable linearly in relation to the longitudinal stroke carriage, in the longitudinal adjustment direction by the longitudinal stroke drive,

a transverse stroke drive by which the transmission piece is adjustable from the intermediate position into the first closing position or into the second closing position,

a transverse stroke linear guide which comprises a transverse stroke guide part which extends parallel to an oblique adjustment direction which extends obliquely with respect to the longitudinal adjustment direction, and a transverse stroke carriage which is guided displaceably by the transverse stroke guide part,

the transmission piece is connected via the longitudinal stroke linear guide and the transverse stroke linear guide to the valve body,

and, for adjustment of the transmission piece from the intermediate position into the first closing position, the transverse stroke carriage is linearly displaceable in relation to the transverse stroke guide part, or the transverse stroke guide part is linearly displaceable in relation to the transverse stroke carriage, in the oblique adjustment direction by the transverse stroke drive from a central position into a first press-on position,

and, for the adjustment of the transmission piece from the intermediate position into the second closing position, the transverse stroke carriage is linearly displaceable in relation to the transverse stroke guide part, or the transverse stroke guide part is linearly displaceable in relation to the transverse stroke carriage, counter to the oblique adjustment direction by the transverse stroke drive from the central position into a second press-on position,

wherein the central position lies between the first press-on position and the second press-on position, and

during the adjustment of the transmission piece from the intermediate position into the first closing position and during the adjustment of the transmission piece from the intermediate position into the second closing position, a relative displacement between the longitudinal stroke guide part and the longitudinal stroke carriage occurs.

2. The vacuum valve as claimed in claim 1, wherein the oblique adjustment direction is inclined by an angle of less than 45°

in relation to the longitudinal adjustment direction.

3. The vacuum valve as claimed in claim 2, wherein the oblique adjustment direction is inclined by an angle of more than 4°

in relation to the longitudinal adjustment direction.

4. The vacuum valve as claimed in claim 3, wherein the oblique adjustment direction encloses an angle which lies within a range of 5°

to 20°

with the longitudinal adjustment direction.

5. The vacuum valve as claimed in claim 1, wherein the oblique adjustment direction lies in a plane spanned by the longitudinal adjustment direction and the transverse adjustment direction.

6. The vacuum valve as claimed in claim 1, wherein the transverse adjustment direction is at right angles to the longitudinal adjustment direction.

7. The vacuum valve as claimed in claim 1, wherein the transverse adjustment direction lies parallel to one of the first axis and the second axis.

8. The vacuum valve as claimed in claim 1, wherein the valve rod has a longitudinal axis that extends parallel to the longitudinal adjustment direction.

9. The vacuum valve as claimed in claim 1, wherein a connection of the transmission piece to the longitudinal stroke drive has movability parallel to the transverse adjustment direction.

10. The vacuum valve as claimed in claim 9, further comprising a connecting piece on which the longitudinal stroke drive acts, and the connecting piece is guided displaceably parallel to the transverse adjustment direction by the transmission piece.

11. The vacuum valve as claimed in claim 1, wherein the longitudinal stroke linear guide comprises first and second longitudinal stroke linear guides and the transverse stroke linear guide comprises first and second transverse stroke linear guides, and the first and second longitudinal stroke linear guides and the first and second transverse stroke linear guides connect the transmission piece to the valve body and are arranged on opposite sides of the transmission piece.

12. The vacuum valve as claimed in claim 1, wherein a drive unit which includes the longitudinal stroke drive and the transverse stroke drive is removable as a whole from a remaining part of the vacuum valve.