Pressure sensor, acoustic microphone, blood pressure sensor, and touch panel
First Claim
1. A sensor, comprising:
- a film part supported by a support unit, the film part being flexible, the film part having a film surface; and
a sensing unit fixed to the film surface,the sensing unit including a first sensing group, and a second sensing group,the first sensing group including a plurality of first sensing elements, and the second sensing group including a plurality of second sensing elements,the first sensing elements being arranged along a first direction,the second sensing elements being arranged along the first direction, the second sensing elements being apart from the first sensing elements along a second direction crossing the first direction,a distance in the first direction between two of the first sensing elements being shorter than a distance in the second direction between one of the first sensing elements and one of the second sensing elements, the two of the first sensing elements being closest among the first sensing elements,a distance in the first direction between two of the second sensing elements being shorter than the distance in the second direction between one of the first sensing elements and one of the second sensing elements, the two of the second sensing elements being closest among the second sensing elements,the first sensing elements being connected in series with each other, and the second sensing elements being connected in series with each other, each of the first sensing elements and the including a first magnetic layer, a second magnetic layer provided between the first magnetic layer and the film part, and a spacer layer provided between the first magnetic layer and the second magnetic layer,a first end of the first sensing group being connected with a first node of a bridge circuit,a second end of the first sensing group being connected with a second node of the bridge circuit,a third end of the second sensing group being connected with a third node of the bridge circuit,a fourth end of the second sensing group being connected with a fourth node of the bridge circuit,the sensing unit further including a third sensing group and a fourth sensing group,the third sensing group including a plurality of third sensing elements, and the fourth sensing group including a plurality of fourth sensing elements,the third sensing elements being arranged along the second direction,the fourth sensing elements being arranged along the second direction,a distance in the second direction between two of the third sensing elements being shorter than a distance in the first direction between one of the third sensing elements and one of the fourth sensing elements, the two of the third sensing elements being closest among the third sensing elements,a distance in the second direction between two of the fourth sensing elements being shorter than the distance in the first direction between one of the third sensing elements and one of the fourth sensing elements, the two of the fourth sensing elements being closest among the fourth sensing elements,the third sensing elements being connected in series with each other, and the fourth sensing elements being connected in series with each other, each of the third sensing elements and the fourth sensing elements including the first magnetic layer, the second magnetic layer, and the spacer layer,a fifth end of the third sensing group being connected with the second node,a sixth end of the third sensing group being connected with the third node,a seventh end of the fourth sensing group being connected with the first node, andan eighth end of the fourth sensing group being connected with the fourth node.
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Abstract
According to one embodiment, a pressure sensor includes a film part, and a sensing unit. A circumscribing rectangle circumscribing a configuration of a film surface of the film part has a first side, a second side, a third side connected to one end of the first side and one end of the second side, a fourth side connected to one other end of the first side and one other end of the second side, and a centroid of the circumscribing rectangle. The circumscribing rectangle includes a first region enclosed by the first side, line segments connecting the centroid to the one end of the first side, and to the one other end of the first side. The sensing unit includes sensing elements provided on a portion of the film surface overlapping the first region. Each sensing element includes a first, second magnetic layers, and a spacer layer.
23 Citations
7 Claims
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1. A sensor, comprising:
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a film part supported by a support unit, the film part being flexible, the film part having a film surface; and a sensing unit fixed to the film surface, the sensing unit including a first sensing group, and a second sensing group, the first sensing group including a plurality of first sensing elements, and the second sensing group including a plurality of second sensing elements, the first sensing elements being arranged along a first direction, the second sensing elements being arranged along the first direction, the second sensing elements being apart from the first sensing elements along a second direction crossing the first direction, a distance in the first direction between two of the first sensing elements being shorter than a distance in the second direction between one of the first sensing elements and one of the second sensing elements, the two of the first sensing elements being closest among the first sensing elements, a distance in the first direction between two of the second sensing elements being shorter than the distance in the second direction between one of the first sensing elements and one of the second sensing elements, the two of the second sensing elements being closest among the second sensing elements, the first sensing elements being connected in series with each other, and the second sensing elements being connected in series with each other, each of the first sensing elements and the including a first magnetic layer, a second magnetic layer provided between the first magnetic layer and the film part, and a spacer layer provided between the first magnetic layer and the second magnetic layer, a first end of the first sensing group being connected with a first node of a bridge circuit, a second end of the first sensing group being connected with a second node of the bridge circuit, a third end of the second sensing group being connected with a third node of the bridge circuit, a fourth end of the second sensing group being connected with a fourth node of the bridge circuit, the sensing unit further including a third sensing group and a fourth sensing group, the third sensing group including a plurality of third sensing elements, and the fourth sensing group including a plurality of fourth sensing elements, the third sensing elements being arranged along the second direction, the fourth sensing elements being arranged along the second direction, a distance in the second direction between two of the third sensing elements being shorter than a distance in the first direction between one of the third sensing elements and one of the fourth sensing elements, the two of the third sensing elements being closest among the third sensing elements, a distance in the second direction between two of the fourth sensing elements being shorter than the distance in the first direction between one of the third sensing elements and one of the fourth sensing elements, the two of the fourth sensing elements being closest among the fourth sensing elements, the third sensing elements being connected in series with each other, and the fourth sensing elements being connected in series with each other, each of the third sensing elements and the fourth sensing elements including the first magnetic layer, the second magnetic layer, and the spacer layer, a fifth end of the third sensing group being connected with the second node, a sixth end of the third sensing group being connected with the third node, a seventh end of the fourth sensing group being connected with the first node, and an eighth end of the fourth sensing group being connected with the fourth node. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification