Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method

• US 10,234,770 B2
• Filed: 06/07/2013
• Issued: 03/19/2019
• Est. Priority Date: 02/06/2004
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Tanitsu, Osamu, Shigematsu, Koji, Hirota, Hiroyuki, Matsuyama, Tomoyuki
• Primary Examiner(s): Lapage, Michael P
• Application Number:
  US13/912,832
• Publication Number:
  US 20130271945A1
• Time in Patent Office: 2,111 Days
• Field of Search: 356364-370
• CPC Class Codes: F21V 13/02 Combinations of only two kinds of elements
• CPC Class Codes: F21V 9/14 for producing polarised light
• CPC Class Codes: G02B 27/0977 Reflective elements
• CPC Class Codes: G02B 27/286 for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another G02B5/3083 takes precedence; light guide coupling means utilising polarising elements G02B6/34
• CPC Class Codes: G02B 5/3025 Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state G02B5/3008, G02B5/3016 take precedence
• CPC Class Codes: G03F 7/701 Off-axis setting using an aperture
• CPC Class Codes: G03F 7/70191 Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
• CPC Class Codes: G03F 7/70308 Optical correction elements, filters or phase plates for manipulating imaging light, e.g. intensity, wavelength, polarisation, phase or image shift
• CPC Class Codes: G03F 7/70566 Polarisation control

Abstract

There is disclosed a polarization-modulating element for modulating a polarization state of incident light into a predetermined polarization state, the polarization-modulating element being made of an optical material with optical activity and having a circumferentially varying thickness profile.

Claims

1. An illumination optical apparatus which illuminates an object with illumination light, the illumination optical apparatus comprising:

a fly'"'"'s eye lens arranged in an optical path of the illumination light so that a rear focal plane of the fly'"'"'s eye lens is substantially located on an illumination pupil plane of the illumination optical apparatus;

a polarization modulator made of an optical material with optical activity and provided with an uneven profile on at least one of an entrance surface and an exit surface of the polarization modulator such that the polarization modulator has different thicknesses of the optical material with respect to different positions on the entrance surface, the polarization modulator being arranged in the optical path on an incidence side of the fly'"'"'s eye lens such that a direction of an optic axis of the optical material is substantially coincident with a direction of an optical axis of the illumination optical apparatus; and

a plurality of optical elements arranged in the optical path on the incidence side of the fly'"'"'s eye lens, the plurality of optical elements being movable relative to each other and modulating a light intensity distribution of the illumination light on the illumination pupil plane by moving the plurality of optical elements relative to each other;

wherein the polarization modulator rotates a polarization direction of the illumination light and forms a linearly polarized state of the illumination light on the illumination pupil plane by rotating the polarization direction of the illumination light, the linearly polarized state having polarization directions being substantially coincident with an azimuthal direction about the optical axis or a radial direction centered around the optical axis on the illumination pupil plane.

2. The illumination optical apparatus according to claim 1, further comprising an optical system including a lens element arranged in the optical path of the illumination light from the fly'"'"'s eye lens, which irradiates the object with the illumination light from the fly'"'"'s eye lens in a polarization state in which a principal component is S-polarized light with respect to the object.

3. The illumination optical apparatus according to claim 1, wherein a first thickness of the polarization modulator in an optical path of a first part of the illumination light is different from a second thickness of the polarization modulator in an optical path of a second part of the illumination light, and

the first part of the illumination light passes through a first portion of the pupil plane away from the optical axis, and the second part of the illumination light passes through a second portion of the illumination pupil plane away from the optical axis, the first and second portions being different from each other.

4. The illumination optical apparatus according to claim 3, further comprising a polarization state converter arranged in the optical path on an incidence side of the polarization modulator, wherein

the polarization state converter converts a polarization state of the illumination light from a first polarization state including a substantially single polarization into a second polarization state different from the first polarization state.

5. The illumination optical apparatus according to claim 4, wherein a principal component of the second polarization state is linearly polarized light polarized substantially in the single direction.

6. The illumination optical apparatus according to claim 4, wherein a principal component of the first polarization state is linearly polarized light, circularly polarized light or elliptically polarized light.

7. The illumination optical apparatus according to claim 4, wherein the polarization state converter comprises at least one of a half wavelength plate and a quarter wavelength plate.

8. The illumination optical apparatus according to claim 4, wherein the first and second portions are included in an annular region about the optical axis.

9. The illumination optical apparatus according to claim 4, wherein the first and second portions are substantially discrete from each other and are aligned along a circumference about the optical axis.

10. The illumination optical apparatus according to claim 3, wherein the first and second portions are included in an annular region about the optical axis.

11. The illumination optical apparatus according to claim 10, wherein the first and second portions are substantially discrete from each other.

12. The illumination optical apparatus according to claim 3, wherein the first and second portions are substantially discrete from each other and are aligned along a circumference about the optical axis.

13. The illumination optical apparatus according to claim 1, further comprising a polarization state converter arranged in the optical path on an incidence side of the polarization modulator, wherein

the polarization state converter converts a polarization state of the illumination light from a first polarization state including a substantially single polarization into a second polarization state different from the first polarization state.

14. The illumination optical apparatus according to claim 13, wherein a principal component of the second polarization state is linearly polarized light polarized substantially in the single direction.

15. The illumination optical apparatus according to claim 13, wherein a principal component of the first polarization state is linearly polarized light, circularly polarized light or elliptically polarized light.

16. The illumination optical apparatus according to claim 13, wherein the polarization state converter comprises at least one of a half wavelength plate and a quarter wavelength plate.

17. An exposure apparatus which exposes a substrate to light via an object having a pattern, the exposure apparatus comprising:

a stage which holds the substrate,

the illumination optical apparatus as defined in claim 1 which illuminates the pattern with the light; and

a projection optical system which projects an image of the pattern illuminated with the light onto the substrate held by the stage.

18. The exposure apparatus according to claim 17, wherein the substrate is exposed to the light through liquid.

19. The exposure apparatus according to claim 17, wherein the illumination optical apparatus illuminates the object with the light in a polarization state in which a principal component is S-polarized light with respect to the object.

20. The exposure apparatus according to claim 17, wherein a first thickness of the polarization modulator in an optical path of a first part of the light is different from a second thickness of the polarization modulator in an optical path of a second part of the light, and

the first part of the light passes through a first portion of the pupil plane away from the optical axis, and the second part of the light passes through a second portion of the illumination pupil plane away from the optical axis, the first and second portions being different from each other.

21. The exposure apparatus according to claim 20, further comprising a polarization state converter arranged in the optical path on an incidence side of the polarization modulator, wherein

the polarization state converter converts a polarization state of the illumination light from a first polarization state including a substantially single polarization into a second polarization state different from the first polarization state.

22. The exposure apparatus according to claim 21, wherein a principal component of the second polarization state is linearly polarized light polarized substantially in the single direction.

23. The exposure apparatus according to claim 21, wherein a principal component of the first polarization state is linearly polarized light, circularly polarized light or elliptically polarized light.

24. The exposure apparatus according to claim 21, wherein the polarization state converter comprises at least one of a half wavelength plate and a quarter wavelength plate.

25. The exposure apparatus according to claim 20, wherein the first and second portions are included in an annular region about the optical axis.

26. The exposure apparatus according to claim 25, wherein the first and second portions are substantially discrete from each other.

27. The exposure apparatus according to claim 20, wherein the first and second portions are substantially discrete from each other and are aligned along a circumference about the optical axis.

28. A device manufacturing method, comprising:

transferring a pattern to a substrate by using the exposure apparatus as defined in claim 17; and

developing the substrate to which the pattern is transferred.

29. The device manufacturing method according to claim 28, wherein the pattern is transferred to the substrate with light through liquid.

30. An exposure method which exposes a substrate to light via an object having a pattern, the exposure method comprising:

holding the substrate by a stage;

illuminating the pattern with the light by using the illumination optical apparatus as defined in claim 1; and

projecting an image of the pattern illuminated with the light onto the substrate held by the stage.

31. The exposure method according to claim 30, wherein the substrate is exposed to the light through liquid.

32. A device manufacturing method, comprising:

transferring a pattern to a substrate by using the exposure method as defined in claim 30; and

developing the substrate to which the pattern is transferred.

33. The device manufacturing method according to claim 32, wherein the pattern is transferred to the substrate with light through liquid.